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Volumn 68, Issue 22, 1996, Pages 3108-3110

Structural nature of the Si/SiO2 interface through infrared spectroscopy

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000968790     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116438     Document Type: Article
Times cited : (89)

References (9)
  • 1
    • 0001552189 scopus 로고    scopus 로고
    • See, for example, I. W. Boyd and J. I. B. Wilson, J. Vac. Sci. Technol. 62, 3195 (1987).
    • See, for example, I. W. Boyd and J. I. B. Wilson, J. Vac. Sci. Technol. 62, 3195 (1987).
  • 2
    • 21544459248 scopus 로고    scopus 로고
    • 2 Interface, edited by C. R. Helms and B. E. Deal (Plenum, New York 1988), p. 219.
    • 2 Interface, edited by C. R. Helms and B. E. Deal (Plenum, New York 1988), p. 219.
  • 4
    • 26744445785 scopus 로고    scopus 로고
    • D. W. Berreman, Phys. Rev. 130, 2193 (1963).
    • D. W. Berreman, Phys. Rev. 130, 2193 (1963).
  • 5
    • 21544458695 scopus 로고    scopus 로고
    • 2, edited by R. A. B. Devine (Plenum, New York 1988) p. 297.
    • 2, edited by R. A. B. Devine (Plenum, New York 1988) p. 297.
  • 6
    • 21544437351 scopus 로고    scopus 로고
    • R. A. B. Devine, Trans. Mater. Res. Soc. Jpn. 8, 165 (1992).
    • R. A. B. Devine, Trans. Mater. Res. Soc. Jpn. 8, 165 (1992).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.