Simulation of plasma-based ion implantation of a sawtooth target

Surface and Coatings Technology

Volumn 93, Issue 2-3, 1997, Pages 225-228

  Sheridan, T E ^a  

^a WEST VIRGINIA UNIVERSITY   (United States)

Author keywords

Plasma simulation; Plasma based ion implantation; Sawtooth; Sheath

Indexed keywords

COMPUTER SIMULATION; ION BEAMS; PLASMA SHEATHS; PLASMA SIMULATION;

ION FLUX; ION IMPACT ENERGY; PLASMA BASED ION IMPLANTATION;

ION IMPLANTATION;

EID: 0031219904     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00049-2     Document Type: Article

References (17)

1. J.R. Conrad, J.L. Radtke, R.A. Dodd, F.J. Worzala, N.C. Tran, J. Appl. Phys. 62 (1987) 4591.
2. G.A. Collins, R. Hutchings, J. Tendys, M. Samandi, Surf. Coat. Technol. 68/69 (1994) 285.
3. T.E. Sheridan, M.J. Alport, Appl. Phys. Lett. 64 (1994) 1783.
4. T.E. Sheridan, Appl. Phys. Lett. 68 (1996) 1918.
5. M. Hong, G.A. Emmert, J. Vac. Sci. Technol. B 12 (1994) 889.
6. M. Hong, G.A. Emmert, J. Appl. Phys. 78 (1995) 6967.
7. P.A. Watterson, J. Phys. D 22 (1989) 1300.
8. T.E. Sheridan, J. Phys. D 29 (1996) 2725.
9. T.E. Sheridan, J. Phys. D 28 (1995) 1094.
10. T.E. Sheridan, IEEE Trans. Plasma Sci. 24 (1996) 57.
11. S.M. Malik, D.E. Muller, K. Sridharan, R.P. Fetherston, N. Tran, J.R. Conrad, J. Appl. Phys. 77 (1995) 1015.
12. K.A. Meyer, M.S. Harmer, M.J. Alport, IEEE Trans. Plasma Sci., submitted for publication.
13. M. Widner, I. Alexeff, W.D. Jones, K.E. Lonngren, Phys. Fluids 13 (1970) 2532.
14. T.E. Sheridan, Phys. Plasmas 3 (1996) 2461.
15. T.E. Sheridan, J. Appl. Phys. 80 (1996) 66.
16. T.E. Sheridan, Phys. Plasmas 3 (1996) 3507.
17. T.E. Sheridan, M.J. Alport, J. Vac. Sci. Technol. B 12 (1994) 897.