Study of surface defects on 3C-SiC films grown on Si(1 1 1) by CVD

Journal of Crystal Growth

Volumn 253, Issue 1-4, 2003, Pages 95-101

  Hernandez M J ^a   Ferro, G ^b   Chassagne, T ^b   Dazord, J ^b   Monteil, Y ^b  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

^b UNIVERSITÉ LYON 1   (France)

Author keywords

A1. X ray diffraction; A3. Vapor phase epitaxy; B1. Silicon carbide

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; FILM GROWTH; MORPHOLOGY; SILICON; SILICON CARBIDE; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

SURFACE DEFECTS;

THIN FILMS;

EID: 18844473608     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(03)01024-8     Document Type: Article

References (15)

1. Lu C.Y., Cooper J.A., Chung G.Y., Williams J.R., McDonald K., Feldman L.C. Mater. Sci. Forum. 389-393:2002;977.
2. Nishino S., Powell J.A., Will H.A. Appl. Phys. Lett. 42:1983;460.
3. Davis R.F., Gehrke T., Linthicum K.J., Zheleva T.S., Preble E.A., Rajagopal P., Zorman C.A., Mehregany M.J. J. Crystal Growth. 225:2001;134.
4. Liaw H.M., Venugopal R., Wan J., Doyle R., Fejes P., Loboda M.J., Melloch M.R. Mater. Sci. Forum. 338-342:2000;1463.
5. Aboughé P., Chassagne T., Chaussende D., Monteil Y., Cauwet F., Bustarret E., Deneuville A., Bentoumi G., Martinez-Guerrerro E., Daudin B., Feuillet G. Mater. Sci. Forum. 338-342:2000;1467.
6. Martinez-Guerrero E., Daudin B., Feuillet G., Mariette H., Genuist Y., Fanget S., Philippe A., Dubois C., Bru-Chevallier C., Guillot G., Aboughé Nze P., Chassagne T., Monteil Y., Gamez-Cuatzin H., Tardy J. Mater. Sci. Eng. B82(1-3):2001;59.
7. Liaw H.P., Davis R.F. J. Electrochem. Soc. 131(12):1984;3014.
8. G. Ferro, V. Thevenot, H. Vincent, Y. Monteil, J. Bouix, Proceedings of the XIV International Conference, EUROCVD 11, Paris, France, 1997, p. 1409.
9. Chassagne T., Ferro G., Chaussende D., Cauwet F., Monteil Y., Bouix J. Thin Solid Films. 402:2002;83.
10. Shim H.W., Kim K.C., Seo Y.H., Nahm K.S., Suh E.-K., Lee H.J., Hwang Y.G. Appl. Phys. Lett. 70(13):1997;1757.
11. Long C., Ustin S.A., Ho W. J. Appl. Phys. 86(5):1999;2509.
12. Thomas R.N., Francombe M.H. Surf. Sci. 25:1971;357.
13. Kimoto T., Matsunami H. J. Appl. Phys. 78(5):1995;3132.
14. Olego D., Cardona M., Vogl P. Phys. Rev. B. 25(6):1982;3878.
15. H.F. Wolf, Silicon Semiconductor Data, Pergamon Press, Oxford, 1969, p. 100.