Time-resolved diagnostics in a pulsed, electron beam-generated plasma

IEEE Transactions on Plasma Science

Volumn 33, Issue 2 II, 2005, Pages 838-843

  Walton, Scott G ^a   Leonhardt, Darrin ^a   Fernsler, Richard F ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Ion energy measurement; Mass spectrometry; Plasma diagnostics; Pulsed plasmas

Indexed keywords

ARGON; ELECTRODES; ELECTRON BEAMS; MASS SPECTROMETRY; PLASMA DENSITY;

ION ENERGY MEASUREMENT; LANGMUIR PROBE MEASUREMENTS; PULSED PLASMAS;

PLASMA DIAGNOSTICS;

EID: 18844454779     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.845239     Document Type: Article

References (17)

1. R. F. Fernsler, W. M. Manheimer, R. A. Meger, J. Mathew, D. P. Murphy, R. E. Pechacek, and J. A. Gregor, "Production of large-area plasma by electron beams," Phys. Plasmas, vol. 5, pp. 2137-2143, 1998.
2. W. M. Manheimer, R. F. Fernsler, M. Lampe, and R. A. Meger, "Theoretical overview of the large-area plasma processing system (LAPPS)," Plasma Sources Sci. Technol., vol. 9, pp. 370-386, 2000.
3. C. Muratore, D. Leonhardt, S. G. Walton, D. D. Blackwell, R. F. Fernsler, and R. A. Meger, "Low temperature nitriding of stainless steel in an electron beam generated plasma," Surf. Coat Technol., vol. 191, pp. 255-262, 2005.
4. D. Leonhardt, C. Muratore, S. G. Walton, D. D. Blackwell, R. F. Fernsler, and R. A. Meger, "Generation of electron-beam produced plasmas and applications to surface modification," Surf. Coat Technol., vol. 177-178, p. 682, 2004.
5. D. Leonhardt, S. G. Walton, C. Muratore, R. F. Fernsler, and R. A. Meger, "Etching with electron beam generated plasmas," J. Vac. Sci. Technol., vol. 22, pp. 2276-2283, 2005.
6. D. Leonhardt, C. Muratore, S. G. Walton, and R. A. Meger, "Plasma enhanced surface treatments using electron beam-generated plasmas," Surf. Coat Technol., vol. 188-189, pp. 299-306, 2004.
7. S. G. Walton, C. Muratore, D. Leonhardt, R. F. Fernsler, D. D. Blackwell, and R. A. Meger, "Electron beam-generated plasmas for materials processing," Surf. Coat Technol., vol. 186, pp. 40-46, 2004.
8. D. Leonhardt, S. G. Walton, D. D. Blackwell, W. E. Amatucci, D. P. Murphy, R. F. Fernsler, and R. A. Meger, "Plasma diagnostics in LAPPS," J. Vac. Sci. Technol. A, Vac. Surf. Films, vol. 19, pp. 1367-1373, 2001.
9. S. G. Walton, D. Leonhardt, D. D. Blackwell, R. F. Fernsler, D. P. Murphy, and R. A. Meger, "Ion energy distributions in a pulsed, electron beam-generated plasma," J. Vac. Sci. Technol. A, A, Vac. Surf. Films, vol. 19, no. 4, pp. 1325-1329, 2001.
10. S. G. Walton, D. Leonhardt, D. D. Blackwell, R. F. Fernsler, D. P. Murphy, and R. A. Meger, "Time-resolved ion flux measurements in pulsed, electron beam-generated plasmas," Phys. Rev E, Stat. Phys. Plasmas Fluids Relat. Interdiscip. Top., vol. 65, 2002.
11. D. Leonhardt, W. Amatucci, and G. Gatling, "Temporally Resolved Langmuir Probe Measurements in LAPPS,", U.S. Naval Res. Lab. Memo. Rep. NRL/MR/6750-04-8761, 2004.
12. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing. New York: Wiley, 1994, ch. 6.
13. M. A. Liebermann and S. Ashida, "Global models of pulse-power-modulated high-density, low-pressure discharges," Plasma Sources Sci. Technol., vol. 5, pp. 145-158, 1996.
14. D. R. Bates and A. Delgarno, Atomic and Molecular Processes. New York: Academic, 1962.
15. L. S. Frost and A. V. Phelps, "Momentum-transfer cross section for slow electrons in He, Ar, Kr, and Xe from transport coefficients," Phys. Rev., vol. 136, pp. A1538-A1545, 1964.
16. A. V. Phelps, "The application of scattering cross sections to ion flux models in discharge sheaths," J. Appl. Phys., vol. 76, pp. 747-753, 1994.
17. R. Johnson and M. A. Biondi, "Measurements of radiative charge-transfer reactions of doubly and singly charged rare gas ions with rare-gas atoms at thermal energies," Phys. Rev A, Gen. Phys., vol. 18, pp. 996-1003, 1978.