Generation of electron-beam produced plasmas and applications to surface modification

Surface and Coatings Technology

Volumn 177-178, Issue , 2004, Pages 682-687

  Leonhardt, D ^a   Muratore, C ^a   Walton, S G ^a   Blackwell, D D ^a   Fernsler, R F ^a   Meger, R A ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Electron beam ionization; Large area plasmas; Materials processing; Plasma processing

Indexed keywords

CATHODES; COMPOSITION; ELECTRON BEAMS; IONIZATION; MAGNETIC FIELDS; PHOTORESISTS;

LARGE AREA PLASMA PROCESSING SYSTEM (LAPPS);

PLASMAS;

SURFACE TREATMENT;

EID: 1342268116     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.08.007     Document Type: Article

References (12)

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6. ® insulation performed similarly. The use of these robust and vacuum compatible materials greatly enhanced the operation lifetime and versatility of the cathode
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10. Magnetized plasmas demonstrate a skewed electron saturation current due to a depletion of the magnetic flux tube that intersects the Langmuir probe, although other plasma parameters are relatively unchanged. See B.-W. Koo, N. Hershkowitz, J. Appl. Phys. 86 (1999) 1213
11. e is the component of the electron temperature perpendicular to the magnetic field
12. Bárdoš L. Baránková H. Vac. Technol. Coat. 47 September 2001