High index contrast waveguides in chalcogenide glass and polymer

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 11, Issue 2, 2005, Pages 539-546

  Decorby, Ray G ^a,b   Ponnampalam, Nakeeran ^a,b   Pai, Mahesh M ^a,b   Nguyen, Hue T ^a,b   Dwivedi, Prabhat K ^a,b   Clement, Thomas J ^a,b   Haugen, Chris J ^a,b   McMullin, Jim N ^a,b   Kasap, Safa O ^c  

^a UNIVERSITY OF ALBERTA   (Canada)

^b TRLABS   (Canada)

^c UNIVERSITY OF SASKATCHEWAN   (Canada)

Author keywords

Amorphous semiconductors; Integrated optics; Optical planar waveguide components; Optical strip waveguides; Thin film devices

Indexed keywords

ARSENIC COMPOUNDS; DOPING (ADDITIVES); ETCHING; GLASS; INTEGRATED OPTICS; INTEGRATED OPTOELECTRONICS; MASKS; PHOTORESISTS; POLYMERS; SEMICONDUCTOR MATERIALS; THIN FILM DEVICES; WAVEGUIDE COMPONENTS;

AMORPHOUS SEMICONDUCTORS; OPTICAL PLANAR WAVEGUIDE COMPONENTS; OPTICAL STRIP WAVEGUIDES; PHOTODOPING;

OPTICAL WAVEGUIDES;

EID: 18844380915     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2005.845610     Document Type: Review

References (49)

1. C. Manolatou, S. G. Johnson, S. Fan, P. R. Villeneuve, H. A. Haus, and J. D. Joannopoulos, "High-density integrated optics," J. Lightw. Technol., vol. 17, no. 9, pp. 1682-1692, Sep. 1999.
2. L. C. Kimerling, "Silicon microphotonics," Appl. Surf. Sci., vol. 159-160, pp. 8-13, 2000.
3. K. Azadet, E. F. Haratsch, H. Kim, F. Saibi, J. H. Saunders, M. Shaffer, L. Song, and M.-L. Yu, "Equalization and FEC techniques for optical transceivers," IEEE J. Solid-State Circuits, vol. 37, no. 3, pp. 317-327, Mar. 2002.
4. A. V. Mule, E. N. Glytsis, T. K. Gaylord, and J. D. Meindl, "Electrical and optical clock distribution networks for gigascale microprocessors," IEEE Trans. Very Large Scale (VLSI) Syst., vol. 10, no. 5, pp. 582-594, Oct. 2002.
5. G. T. Reed, "The optical age of silicon," Nature, vol. 427, pp. 595-596, 2004.
6. Y. A. Vlasov and S. J. McNab, "Losses in single-mode silicon-on-in-sulator strip waveguides and bends," Opt. Express, vol. 12, no. 8, pp. 1622-1631, 2004.
7. U. Hilleringmann and K. Goser, "Optoelectronic system integration on silicon: Waveguides, photodetectors, and VLSI CMOS circuits on one chip," IEEE Trans. Electron Devices, vol. 42, no. 5, pp. 841-846, May 1995.
8. V. Stenger and F. R. Beyette, "Design and analysis of an optical waveguide tap for silicon CMOS circuits," J. Lightw. Technol., vol. 20, no. 2, pp. 277-284, Feb. 2002.
9. A. M. Agarwal, L. Liao, J. S. Foresi, M. R. Black, X. Duan, and L. C. Kimerling, "Low-loss polycrystalline silicon waveguides for silicon photonics," J. Appl. Phys., vol. 80, no. 11, pp. 6120-6123, 1996.
10. S. Sedky, A. Witvrouw, H. Bender, and K. Baert, "Experimental determination of the maximum post-process annealing temperature for standard CMOS wafers," IEEE Trans. Electron Devices, vol. 48, pp. 377-385, 2001.
11. H. T. Philipp, K. N. Andersen, W. Svendsen, and H. Ou, "Amorphous silicon rich silicon nitride optical waveguides for high density integrated optics," Electron. Lett., vol. 40, no. 7, pp. 419-421, Apr. 2004.
12. 5 rib waveguide Mach-Zehnder interferometer," IEEE Photon. Technol. Lett., vol. 16, no. 6, pp. 1522-1524, Jun. 2004.
13. A. Zakery and S. R. Elliot, "Optical properties and applications of chalcogenide glasses: A review," J. Non-Cryst. Solids, vol. 330, pp. 1-12, 2003.
14. M. Frumar and T. Wagner, "Ag doped chalcogenide glasses and their applications," Curr. Opin. Solid State Mater. Sci., vol. 7, pp. 117-126, 2003.
15. A. R. Hilton and D. J. Hayes, "The interdependence of physical parameters for infrared transmitting glasses," J. Non-Cryst. Solids, vol. 17, pp. 339-348, 1975.
16. V. Lyubin, M. Klebanov, A. Feigel, and B. Sfez, "Films of chalcogenide glassy semiconductors: New phenomena and new applications," Thin Solid Films, vol. 459, pp. 183-186, 2004.
17. D. J. Gibson and J. A. Harrington, "Extrusion of hollow waveguide performs with a one-dimensional photonic bandgap structure," J. Appl. Phys., vol. 95, no. 8, pp. 3895-3900, 2004.
18. K. Kuriki, O. Shapira, S. D. Hart, G. Benoit, Y. Kuriki, J. F. Viens, M. Bayindir, J. D. Joannopoulos, and Y. Fink, "Hollow multilayer photonic bandap fibers for NIR applications," Opt. Express, vol. 12, no. 8, pp. 1510-1517, 2004.
19. X. H. Zhang, Y. Guimond, and Y. Bellec, "Production of complex chalcogenide glass optics by molding for thermal imaging," J. Non-Cryst. Solids, vol. 326-327, pp. 519-523, 2003.
20. M. Naito, M. Ishimaru, and Y. Hirotsu, "Local structure analysis of Ge-Sb-Te phase change materials using high-resolution electron microscopy and nanobeam diffraction," J. Appl. Phys., vol. 95, no. 12, pp. 8130-8135, 2004.
21. J. D. Maimon, K. K. Hunt, L. Burcin, and J. Rodgers, "Chalcogenide memory arrays: Characterization and radiation effects," IEEE Trans. Nucl. Sci., vol. 50, no. 6, pp. 1878-1884, Dec. 2003.
22. L. B. Shaw, B. Cole, P. A. Thielen, J. S. Sanghera, and I. D. Aggarwal, "Mid-wave IR and long-wave IR laser potential of rare-earth doped chalcogenide glass fiber," IEEE J. Quantum Electron., vol. 48, no. 9, pp. 1127-1137, Sep. 2001.
23. 3 chalcogenide fibers," J. Opt. Soc. Amer. B, vol. 21, no. 6, pp. 1146-1155, 2004.
24. S. Spalter, H. Y. Hwang, J. Zimmerman, G. Lenz, T. Katsufuji, S.-W. Cheong, and R. E. Slusher, "Strong self-phase modulation in planar chalcogenide glass waveguides," Opt. Lett., vol. 27, no. 5, pp. 363-365, 2002.
25. Y. Ohmachi, "Acousto-optical light diffraction in thin films," J. Appl. Phys., vol. 44, no. 9, pp. 3928-3933, 1973.
26. J.-F. Viens, C. Meneghini, A. Villencuve, T. V. Galstian, E. J. Knystautas, M. A. Duguay, K. A. Richardson, and T. Cardinal, "Fabrication and characterization of integrated optical waveguides in sulfide chalcogenide glasses," J. Lightw. Technol., vol. 17, no. 7, pp. 1184-1191, Jul. 1999.
27. S. Ramachandran and S. G. Bishop. "Low loss photoinduced waveguides in rapid thermally annealed films of chalcogenide glasses," Appl. Phys. Lett., vol. 74, no. 1, pp. 13-15. 1999.
28. 3 chalcogenide thin films at 1.5 μm," Opt. Lett., vol. 28, no. 12, pp. 965-967, 2003.
29. R. K. Watts, M. de Wit, and W. C. Holton, "Monoxide chalcogenide glass films for integrated optics," Appl. Opt., vol. 13, no. 10, pp. 2329-2332, 1974.
30. S. Zembutsu and S. Fukunishi, "Waveguiding properties of (Se,S)- based chalcogenide glass films and some applications to optical waveguide devices," Appl. Opt., vol. 18, no. 3, pp. 393-399, 1979.
31. T. Suhara and H. Nishihara, "Integrated optics components and devices using periodic structures," IEEE J. Quantum Electron., vol. QE-22, no. 6, pp. 845-867, Jun. 1986.
32. 3 chalcogenide rib waveguides," Opt. Commun., vol. 230, pp. 301-307, 2004.
33. 3 chalcogenide films," J. Opt. Soc. Amer. B., vol. 20, no. 9, pp. 1844-1852, 2003.
34. C. Gmachl, H. Y. Hwang, R. Paiella, D. L. Sivco, J. N. Baillargeon, F. Capasso, and A. Y. Cho, "Quantum cascade lasers with low-loss chalcogenide lateral waveguides," IEEE Photon. Technol. Lett., vol. 13, no. 3, pp. 182-184, Mar. 2001.
35. V. Balan, C. Vigreux, A. Pradel, A. Llobera, C. Dominguez, M. I. Alonso, and M. Garriga, "Chalcogenide glass-based rib ARROW waveguide," J. Non-Crvst. Solids, vol. 326-327, pp. 455-459, 2003.
36. D. S. Gill, R. W. Eason, C. Zaldo, H. N. Rutt, and N. A. Vainos, "Characterization of Ga-La-S chalcogenide glass thin-film optical waveguides, fabricated by pulsed laser deposition," J. Non-Cryst. Solids, vol. 191, pp. 321-326, 1995.
37. A. K. Mairaj, A. M. Chardon, D. P. Shepherd, and D. W. Hewak, "Laser performance and spectroscopic analysis of optically written channel waveguides in neodymium-doped gallium lanthanum sulphide glass," IEEE J. Sel. Topics Quantum Electron., vol. 8, no. 6, pp. 1381-1388, Nov./Dec. 2002.
38. C. C. Huang, D. W. Hewak, and J. V. Badding, "Deposition and characterization of germanium sulphide glass planar waveguides," Opt. Express, vol. 12, no. 11, pp. 2501-2506, 2004.
39. R. M. Bryce, H. T. Nguyen, P. Nakeeran, T. Clement, C. J. Haugen, R. R. Tykwinski, R. G. DeCorby, and J. N. McMullin, "Polyamide-imide polymer thin films for integrated optics," Thin Solid Films, vol. 458, pp. 233-236, 2004.
40. S. Lardenois, D. Pascal, L. Vivien, E. Cassan, S. Laval, R. Orobtchouk, M. Heitzmann, N. Bouzaida, and L. Mollard, "Low-loss submicrometer silicon-on-insulator rib waveguides and corner mirrors," Opt. Lett., vol. 28, no. 13, pp. 1150-1152, 2003.
41. 3 glass," Opt. Express, vol. 12, no. 25, pp. 6270-6277, Dec. 2004.
42. 3 thin films," J. Vac. Sci. Technol. A, vol. 22, no. 3, pp. 1044-1047, 2004.
43. 3 chalcogenide glass," presented at the Optical Soc. Amer. Integrated Photonics Research Topical Meeting, San Francisco, CA, 2004.
44. T. Barwicz and H. I. Smith, "Evolution of line-edge roughness during fabrication of high-index-contrast microphotonic devices," J. Vac. Sci. Technol. B, vol. 21, no. 6, pp. 2892-2896, 2003.
45. E. M. Dianov, I. A. Bufetov, A. A. Frolov, V. M. Mashinsky, V. G. Plotnichenko, M. F. Churbanov, and G. E. Snopatin, "Catastrophic destruction of fluoride and chalcogenide optical fibers," Electron. Lett., vol. 38, no. 15, pp. 783-784, 2002.
46. J. Fick, B. Nicolas, C. Rivero, K. Elshot, R. Irwin, K. A. Richardson, M. Fischer, and R. Vallee, "Thermally activated silver diffusion in chalcogenide thin films," Thin Solid Films, vol. 418, pp. 215-221, 2002.
47. H.-Y. Lee and T. Yao, "Wet-etching selectivity of Ag-photodoped As-GeSeS thin films and the fabrication of a planar corrugated one-dimensional photonic crystal by a holographic method," J. Vac. Sci. Technol. B., vol. 20, no. 5, pp. 2017-2023, 2002.
48. 2 -based chalcohalide glass for all-optical twin-core-fiber switching," J. Opt. Soc. Amer. B, vol. 15, no. 9, pp. 2361-2370, 1998.
49. K. Ogusu, J. Yamasaki, S. Maeda, M. Kitao, and M. Minakata, "Linear and nonlinear optical properties of Ag-As-Se chalcogenide glasses for all- optical switching," Opt. Lett., vol. 29, no. 3, pp. 265-267, 2004.