Wet-etching selectivity of Ag-photodoped AsGeSeS thin films and the fabrication of a planar corrugated one-dimensional photonic crystal by a holographic method

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 5, 2002, Pages 2017-2023

  Lee, Hyun Yong ^a   Yao, Takafumi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC COMPOUNDS; CHEMICAL MODIFICATION; CRYSTAL STRUCTURE; ETCHING; GAS LASERS; HOLOGRAPHY; LIGHTING; ONE DIMENSIONAL; PHOTOCHEMICAL REACTIONS; SEMICONDUCTOR DOPING; SILVER; SUBSTRATES;

CHALCOGENIDE; GAUSSIAN FORMED SILVER DISTRIBUTION; PHOTODOPING; PLANAR CORRUGATED ONE DIMENSIONAL PHOTONIC CRYSTAL; WET ETCHING;

THIN FILMS;

EID: 0036026376     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1505956     Document Type: Article

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