Universal concept for fabricating micron to millimeter sized 3-D parylene structures on rigid and flexible substrates

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 594-597

  Feng, Guo Hua ^a   Kim, Eun Sok ^a  

^a University of Southern California ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FABRICATION; FLUIDIC DEVICES; MOLDS; ORGANIC POLYMERS; SILICON WAFERS; SUBSTRATES; TEMPERATURE; TOLUENE; TRANSDUCERS; TUBING; WAXES;

CONFORMAL DEPOSITION; DOME SHAPED DIAPHRAGM TRANSDUCERS; FLEXIBLE SUBSTRATES; MICROFLUIDIC CHANNELS; PARYLENE BELLOW TUBINGS; PARYLENE FILM; PARYLENE STRUCTURES; WAX MOLD;

MICROELECTROMECHANICAL DEVICES;

EID: 0038494019     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. Guckel et al, "Deep X-Ray Lithographies for Micromechanics", Technical Digest of the 1990 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 4-7, 1990, pp. 118-122.
2. A. Torge et al, "Laser micromachining of mold inserts for replication techniques - State of the art and applications," Proceedings of the SPIE - The International Society for Optical Engineering 4274, 2001 pp. 331-345.
3. G.M. Whitesides et al, "Fabrication of topologically complex three-dimensional microfluidic systems in PDMS by rapid prototyping," Anal. Chem., 72: 3158-3164.
4. E. E. Hui, C. G. Keller, and R. T. Howe, "Carbonized parylene as a conformal sacrificial layer," Proc. Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 1998, pp. 256-260