Calibration methods of a 2 GHz evanescent microwave magnetic probe for noncontact and nondestructive metal characterization for corrosion, defects, conductivity, and thickness nonuniformities

Review of Scientific Instruments

Volumn 76, Issue 5, 2005, Pages

  Wang, Run ^a   Li, Frank ^a   Tabib Azar, Massood ^a  

^a Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION METHODS; EVANESCENT MICROWAVE (EM); SPATIAL RESOLUTION; THIN CONDUCTING LAYERS;

CALIBRATION; CHARACTERIZATION; DEPOSITION; EDDY CURRENTS; ELECTROMAGNETIC FIELD EFFECTS; IMAGING TECHNIQUES; MICROWAVES; NEAR FIELD SCANNING OPTICAL MICROSCOPY; SEMICONDUCTOR DEVICES;

METALS;

EID: 18744401649     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1900683     Document Type: Article

References (25)

1. S. Wolf, Silicon Processing for the VLSI Era (Lattice, Sunset Beach, CA, 2000).
2. Semiconductor Characterization Present Status and Future Needs edited by, W. M. Bullis, D. G. Seiler, A. C. Diebold, (American Institute of Physics, New York, 1996).
3. P. Van Zant, Microchip Fabrication: A Practical Guide to Semiconductor Processing (McGraw-Hill, New York, 2000).
4. D. T. Peeler and R. C. Kinzie, The 5th Joint FAA/DoD/NASA Conference on Aging Aircrafts (2001).
5. B. Wincheski, J. Fulton, and S. Nath, NASA-Langley Research.
6. U. Durig, D. W. Pohl, and F. Rochrer, J. Appl. Phys. 59, 3318 (1986).
7. M. Tabib-Azar and D. Akinwande, Rev. Sci. Instrum. 71, 1460 (2000).
8. M. Tabib-Azar, D. Akinwande, G. Ponchak, and S. R. LeClair, Rev. Sci. Instrum. 70, 3381 (1999).
9. M. Tabib-Azar, D. Akinwande, G. Ponchak, and S. R. LeClair, Rev. Sci. Instrum. 70, 3083 (1999).
10. M. Tabib-Azar, R. Ciocan, G. Ponchak, and S. R. LeClair, Rev. Sci. Instrum. 70, 3387 (1999).
11. M. Tabib-Azar and B. Sutapun, Rev. Sci. Instrum. 70, 3707 (1999).
12. E. A. Ash and G. Nicholls, Nature (London) 237, 510 (1972).
13. H. A. Bethe, Phys. Rev. 66, 163 (1944).
14. R. F. Soohoo, J. Appl. Phys. 33, 1276 (1962).
15. D. W. van der Weide, Appl. Phys. Lett. 70, 677, (1997).
16. F. Keilmann, D. W. van der Weide, T. Eickelkamp, R. Merz, and D. Stöckle, Opt. Commun. 129, 15 (1996).
17. A. F. Lann, M. Golosovsky, D. Davidov, and A. Frankel, 1998 IEEE MTT-S Int. Microwave Symp. Dig., 1337, (1998).
18. C. Hellier, Handbook of Nondestructive Evaluation (McGraw-Hill, New York, 2001).
19. C. Gao and X.-D. Xiang, Rev. Sci. Instrum. 69, 3846 (1998).
20. M. Tabib-Azar, N. Shoemaker, and S. Harris, Meas. Sci. Technol. 4, 583 (1993).
21. R. E. Collin, Foundations for Microwave Engineering, 2nd ed. (IEEE, New York, 2001).
22. M. Tabib-Azar and S. R. LeClair, Sens. Actuators B 67, 112 (2000).
23. M. Tabib-Azar, D. Akinwande, G. Ponchak, and S. R. LeClair, Rev. Sci. Instrum. 70, 3381 (1999).
24. J. Lawrence Katz, P. S. Pathak, S. Bumrerraj, and M. Tabib-Azar, 20th Annual International Conference of IEEE Engineering in Medicine and Biology Society (1998).
25. M. Tabib-Azar, P. S. Pathak, G. Ponchak, and S. LeClair, Rev. Sci. Instrum. 70, 2783 (1999).