Evanescent microwave probes on high-resistivity silicon and its application in characterization of semiconductors

Review of Scientific Instruments

Volumn 70, Issue 7, 1999, Pages 3083-3086

  Tabib Azar, M ^a   Akinwande, D ^a   Ponchak, G E ^a,b   LeClair, S R ^a,c  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

^b NASA GLENN RESEARCH CENTER   (United States)

^c AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001555409     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149871     Document Type: Article

References (15)

1. W. Durr, U. Erben, A. Schuppen, H. Dietrich, and H. Schumacher, IEEE Trans. Microwave Theory Tech. 46, 712 (1998).
2. G. Ponchak and L. Katehi, IEEE Trans. Microwave Theory Tech. 45, 970 (1997).
3. R. Simons, S. Taub, and P. Young, Electron. Lett. 28, 2209 (1992).
4. R. Simons, S. Taub, and R. Lee, NASA Report No. TM-106057 (1993).
5. A. Khanna and Y. Garault, IEEE Trans. Microwave Theory Tech. MTT-31, 261 (1983).
6. R. E. Collins, Foundations of Microwave Engineering (McGraw-Hill, New York, 1966).
7. R. Romanofsky, NASA Report No. TP-2899 (1989).
8. Topsil Semiconductor Materials, Gilbert, AZ.
9. E. A. Ash and G. Nicholls, Nature (London) 237, 510 (1972).
10. M. Tabib-Azar, N. Shoemaker, and S. Harris, Meas. Sci. Technol. 3, 583 (1993).
11. M. Tabib-Azar, D.-P. Su, A. Pohar, G. Ponchak, and S. R. LeClair, Rev. Sci. Instrum. 70, 1725 (1999).
12. M. Tabib-Azar, S. R. Leclair, and G. Ponchak, Rev. Sci. Instrum. (submitted).
13. M. Tabib-Azar, S. L. LeClair, and G. Ponchak, IEEE MTT-S, Special Issue, Dec. (1999).
14. R. Ciocan and M. Tabib-Azar, Rev. Sci. Instrum. (submitted).
15. M. Tabib-Azar, P. S. Pathak, G. Ponchak, and S. R. LeClair, Rev. Sci. Instrum. 70, 1 (1999).