Single- and double-hot arm asymmetrical polysilicon surface micromachined electrothermal microactuators applied to realize a microengine

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 530-538

  Kolesar, Edward S ^a   Ruff, Matthew D ^a   Odom, William E ^a   Jayachadran, Joseph A ^a   McAllister, Justin B ^a   Ko, Simon Y ^a   Howard, Jeffery T ^a   Allen, Peter B ^a   Wilken, Josh M ^a   Boydston, Noah C ^a   Bosch, Jorge E ^a   Wilks, Richard J ^a  

^a TEXAS CHRISTIAN UNIVERSITY   (United States)

Author keywords

Cantilever; Electrothermal microactuator; Microelectromechanical system; Microengine

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC RESISTANCE; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON; SURFACE PHENOMENA;

MICROENGINES;

MICROACTUATORS;

EID: 0037011446     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00811-8     Document Type: Conference Paper

References (24)

1. Ristic L. Sensor Technology and Devices. 1994;Artech House, Norwood, MA.
2. Pan C.S., Hsu W. An electro-thermally and laterally driven polysilicon microactuator. J. Micromech. Microeng. 7:1997;7-13.
3. Guckel H., Klein J., Cristenson T., Skrobis K., Laudon M., Lovell E.G. Thermo-magnetic metal flexure actuators. Tech. Dig. Solid-State Sen. Act. Workshop, Hilton Head Island, SC, June 22-25. 1992;73-75.
4. Comtois J.H., Bright V.M. Surface micromachined polysilicon thermal actuator arrays and applications. Tech. Dig. Solid-State Sen. Act. Workshop, Hilton Head Island, SC, June 2-6. 1996;174-176.
5. Fedder G.K., Howe R.T. Thermal assembly of polysilicon microstructures. Proc. IEEE Micro Electro Mechanical Systems Workshop, Nara, Japan, January 30-February 2. 1991;63-68.
6. Syms R.A. Electrothermal frequency tuning of folded and coupled vibrating micromechanical resonators. J. Microelectromech. Syst. 7:(2):1998;164-171.
7. Lammerink T.S.J., Elwenspoek M., Fluitman J.H.J. Performance of thermally excited resonators. Sens. Actuators A. 21-23:1990;352-356.
8. Othman M.B., Brunnschweiler A. Electrothermally excited silicon beam mechanical resonators. Electron. Lett. 35:1988;758-762.
9. Lammerink T.S.J., Elwenspoek M., Fluitman J.H.J. Frequency dependence of thermal excitation of mechanical resonators. Sens. Actuators A. 25-27:1991;685-689.
10. Bouwstra S., van Rooijen J., Tilmans H.A.C., Selvakumar A., Najafi K. Thermal base drive for micromechanical resonators employing deep-diffusion bases. Sens. Actuators, A. 37/38:1993;38-44.
11. Noworolski J.M., Klaassen E.H., Logan J.R., Petersen K.E., Maluf N.I. Process for in-plane and out-of-plane single crystal silicon thermal microactuators. Sens. Actuators A. 55:1996;65-69.
12. Lerch P., Slimane C.K., Romanowicz B., Renaud P. Modelization and characterization of asymmetrical thermal micro-actuators. J. Micromech. Microeng. 6:1996;134-137.
13. Keller C.G., Howe R.T. HEXSIL tweezers for teleoperated micro-assembly. Proc. IEEE Micro Electro Mechanical Systems Workshop, Nagoya, Japan, January 26-30. 1997;72-77.
14. Chu W., Mehregany M., Mullen R.L. Analysis of tip deflection and force of a bimetallic cantilever microactuator. J. Micromech. Microeng. 3:1993;4-7.
15. Riethmuller W., Benecke W. Thermally excited silicon microactuators. IEEE Trans. Electron Devices. ED-35(6):1988;758-763.
16. Allen P.B., Wilken J.M., Kolesar E.S. Design, fabrication and performance evaluation of several electrical and mechanical silicon microstructures realized using the emerging technology of microelectromechanical systems (MEMS). Proc. ASEE Conf., Houston, TX, March 23-25. 1997;43-48.
17. Burns D.N., Bright V.M. Design and performance of a double hot arm polysilicon thermal actuator. Proc. SPIE. 3224:1997;296-306.
18. Kolesar E.S., Alen P.B., Howard J.T., Wilken J.M. Thermally actuated microbeam for large in-plane mechanical deflections. J. Vac. Sci. Technol. A. 17:(4):1999;2257-2263.
19. Reid J.R., Bright V.M., Butler J.T. Automated assembly of flip-up micromirrors. Sens. Actuators A. 66:1998;292-298.
20. D. Koester, R. Mahedevan, A. Shishkoff and K. Markus, Multi-User MEMS Processes (MUMPS) Introduction and Design Rules, revision 4, JDS Uniphase MEMS Technology Applications Center, Research Triangle Park, NC.
21. L-Edit® CAD Software Manual, version 7, Tanner Research, Inc., Pasadena, CA.
22. Legtenberg R., Elders J., Elwenspoek M. Stiction of surface microstructures after rinsing and drying: model and investigation of adhesion mechanisms. Proceedings of Transducers '93, 7th International Conference on Solid-State Sensors and Actuators, Yokohama, Japan, June 7-10. 1993;198-201.
23. Mulhern G.T., Soane D.S., Howe R.T. Supercritical carbon dioxide drying of micro- structures. Proceedings of Transducers '93, 7th International Conference on Solid-State Sensors and Actuators, Yokohama, Japan, June 7-10. 1993;296-299.
24. Cochin I., Cadwallender W. Analysis and Design of Dynamic Systems. third ed: 1997;Addison-Wesley, Reading, MA. Chapter 11, pp. 309-353 and Appendix 2, pp. 607-619.