Piezoelectric sensors for investigations of microstructures

Sensors and Actuators, A: Physical

Volumn 65, Issue 1, 1998, Pages 13-18

  Kielczynski P ^a   Pajewski, W ^a   Szalewski, M ^a  

^a INSTITUTE OF FUNDAMENTAL TECHNOLOGICAL RESEARCH   (Poland)

Author keywords

Bimorphs; Microstructures; Piezoelectricity; Surface investigations

Indexed keywords

CRYSTAL MICROSTRUCTURE; PIEZOELECTRICITY; PLATE METAL;

BIMORPHS; PIEZOELECTRIC SENSORS; QUASISTATIC METHOD;

SENSORS;

EID: 0032000112     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)80003-4     Document Type: Article

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