Effect of substrate temperature on the structure and properties of SnO2:Sb films

Gongneng Cailiao/Journal of Functional Materials

Volumn 36, Issue 3, 2005, Pages

  Xie, Lian Ge ^a   Wang, Jian Xun ^a   Shen, Ge ^a   Weng, Wen Jian ^a   Du, Pi Yi ^a   Han, Gao Rong ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

APCVD method; Sb doped SnO2 film; Substrate temperature

Indexed keywords

ANTIMONY COMPOUNDS; CHEMICAL VAPOR DEPOSITION; ELECTRIC PROPERTIES; OPTICAL PROPERTIES; POLYCRYSTALS; SEMICONDUCTING TIN COMPOUNDS; SEMICONDUCTOR DOPING; SUBSTRATES; TEMPERATURE;

ANTIMONY DOPING; APCVD METHOD; MBTC; SUBSTRATE TEMPERATURE; TIN DIOXIDE FILM;

SEMICONDUCTING FILMS;

EID: 18744376313     PISSN: 10019731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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