The origin of haze in CVD tin oxide thin films

Applied Surface Science

Volumn 185, Issue 3-4, 2002, Pages 161-171

  Szanyi, János ^a,b  

^a PPG INDUSTRIES   (United States)

^b PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

AFM; Haze; Internal defects; Polishing; Rugosity; Tin oxide thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; CONDUCTIVE FILMS; DEFECTS; DOPING (ADDITIVES); GLAZES; POLISHING; SOLAR CONTROL FILMS; SUBSTRATES; SURFACE ROUGHNESS; TIN COMPOUNDS;

OXIDE THIN FILMS;

THIN FILMS;

EID: 0037080271     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00554-2     Document Type: Article

References (7)