Embedded conductor technology for micromachined RF elements

Journal of Micromechanics and Microengineering

Volumn 15, Issue 6, 2005, Pages 1317-1326

  Yoon, Yong Kyu ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Embedded conductor; Embedded inductor; High aspect ratio MEMS via; High Q inductor; Packaging

Indexed keywords

ASPECT RATIO; CMOS INTEGRATED CIRCUITS; ELECTRIC CONDUCTORS; ELECTRONICS PACKAGING; EPOXY RESINS; METALLIZING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MULTILAYERS; SOLENOIDS;

DIELECTRIC GAPS; ELECTRICAL DEGRADATION; RADIO FREQUENCY (RF) INDUCTORS; SURFACE MICROMACHINING;

ELECTRIC INDUCTORS;

EID: 18744373607     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/6/025     Document Type: Article

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