A comparison of micro-switch analytic, finite element, and experimental results

Sensors and Actuators, A: Physical

Volumn 115, Issue 2-3 SPEC. ISS., 2004, Pages 252-258

  Coutu Jr , R A ^a   Kladitis, P E ^a   Starman, L A ^b   Reid, J R ^b  

^a Wright Patterson Air Force Base   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Contact force; Contact resistance; MEMS; Micro switch

Indexed keywords

APPROXIMATION THEORY; CANTILEVER BEAMS; DEFLECTION (STRUCTURES); ELECTRIC POTENTIAL; ELECTRIC RESISTANCE; FABRICATION; FINITE ELEMENT METHOD; METALLURGY; OPTIMIZATION; PERMITTIVITY;

CONTACT FORCE; CONTACT RESISTANCE; MICRO-SWITCHES; MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 4544326233     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.03.019     Document Type: Conference Paper

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