Morphological and structural analyses of plasma-induced damage to n-type GaN

Journal of Applied Physics

Volumn 92, Issue 8, 2002, Pages 4381-4385

  Choi, H W ^a   Chua, S J ^a   Tripathy, S ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECT MODE; PLASMA-INDUCED DAMAGE; PREFERENTIAL SPUTTERING; STRUCTURAL DAMAGES; SURFACE-ROUGHENING;

ATOMIC FORCE MICROSCOPY; GALLIUM NITRIDE; RAMAN SCATTERING; RAMAN SPECTROSCOPY;

PLASMAS;

EID: 18744361845     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1509844     Document Type: Article

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