Measurement of the spatial evolution of the deprotection reaction front with nanometer resolution using neutron reflectometry

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4690 I, Issue , 2002, Pages 313-320

  Lin, Eric K ^a   Soles, Christopher L ^a   Goldfarb, Dario L ^b   Trinque, Brian C ^c   Burns, Sean D ^c   Jones, Ronald L ^a   Lenhart, Joseph L ^a   Angelopoulos, Marie ^b   Satija, Sushil K ^a   Wu, Wen Li ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; FABRICATION; NEUTRON REFLECTION; NEUTRON SCATTERING; SURFACE ROUGHNESS;

NEUTRON REFLECTOMETRY; X RAY REFLECTOMETRY;

PHOTORESISTS;

EID: 18644379115     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.474229     Document Type: Article

References (22)

1. D.L. Goldfarb, M. Angelopoulos, E.K. Lin, R.L. Jones, C.L. Soles, J.L. Lenhart, and W.L. Wu, J. Vac. Sci. Technol. B 19, 2699, 2001.
2. C.L. Soles, E.K. Lin, J.L. Lenhart, R.L. Jones, W.L. Wu, D.L. Goldfarb, and M. Angelopoulos, J. Vac. Sci. Technol. B, 19, 2690, 2001.
3. D.S. Fryer, P.F. Nealey, and J.J. de Pablo, Macromolecules 33, 6439, 2000.
4. T.H. Fedynysyn, J.W. Thackery, J.H. Georger, and M.D. Denison, J. Vac. Sci. Technol. B 12, 3888, 1994.
5. T. Itani, H. Yoshino, N. Fujimoto, and K. Kasama, J. Vac. Sci. Technol. B 14, 3026, 1995.
6. J. Nakamura, H. Ban, K. Deguchi, and A. Tanaka, Jpn. J. Appl. Phys. 30, 2619, 1991.
7. S.V. Postnikov, M.D. Stewart, H.V. Tran, M.A. Nierode, D.R. Medeiros, T. Cao, J. Byers, S.E. Webber, and C.G. Willson, J. Vac. Sci. Technol. B 17, 3335, 1999.
8. F.A. Houle, W.D. Hinsberg, M. Morrison, M.I. Sanchez, G. Wallraff, C. Larson, and J. Hoffnagle, J. Vac. Sci. Technol. B, 18, 1874, 2000.
9. D.S. Fryer, S. Bollepali, J.J. de Pablo, and P.F. Nealey, J. Vac. Sci. Technol. B, 17, 3351, 1999.
10. M.D. Stewart, M.H. Somervell, H.V. Tran, S.V. Postnikov, and C.G. Willson, Proc. SPIE 3999, 664, 2000.
11. M. Zuniga and A.R. Neureuther, J. Vac. Sci. Technol. B 13, 2957, 1995.
12. J.S. Peterson et al., Proc. SPIE 2438, 167, 1995.
13. A.A. Krasnoperova et al., J. Vac. Sci. Technol. B 12, 3900, 1994.
14. E. Croffie, M. Cheng, and A.R. Neureuther, J. Vac. Sci. Technol. B, 17, 3339, 1999.
15. B.M. Pope, Y. Yamamoto, and D.S. Tarbell, Org. Synth., 6, 418, 1988.
16. L.G. Parratt, Phys. Rev., 95, 359, 1954.
17. J.S. Higgins and H. Benoit, Polymers and Neutron Scattering, Oxford University Press, New York, 1994.
18. G.M. Wallraff and W.D. Hinsberg, Chem. Rev. 99, 1801, 1999.
19. H. Ito and C.G. Willson, Polym. Eng. Sci. 23, 1021, 1982.
20. H. Ito and M. Sherwood, Proc. SPIE 3678, 104, 1999.
21. F.A. Houle, G. Poliskie, W.D. Hinsberg, D. Pearson, M. Sanchez, H. Ito, and J. Hoffnagle, Proc. SPIE 3999, 181, 2000.
22. th Internatn'l Conf. on Photopolymers, 323, 2001.