Application of adaptive multilevel substructuring technique to model CMOS micromachined thermistor gas sensor, part (I): A feasibility study

Proceedings - International Conference on MEMS, NANO and Smart Systems, ICMENS 2003

Volumn , Issue , 2003, Pages 279-284

  Sadek, K ^a   Moussa, W ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

CMOS technology; Gas detectors; Mechanical engineering; Micromachining; Micromechanical devices; Semiconductor device modeling; Temperature sensors; Thermal conductivity; Thermal sensors; Thermistors

Indexed keywords

CMOS INTEGRATED CIRCUITS; GAS DETECTORS; MECHANICAL ENGINEERING; MICROMACHINING; NANOSENSORS; PARAMETRIC DEVICES; PLANNING; SEMICONDUCTOR DEVICES; TEMPERATURE SENSORS; THERMAL CONDUCTIVITY; THERMAL CONDUCTIVITY OF GASES; THERMISTORS; THERMOANALYSIS;

CMOS TECHNOLOGY; COMPUTATIONAL SAVINGS; FEASIBILITY STUDIES; INTERFACE PROBLEMS; MICROMECHANICAL DEVICE; MULTI-LEVEL SUBSTRUCTURING; PARAMETRIC -ANALYSIS; THERMAL SENSORS;

SEMICONDUCTOR DEVICE MODELS;

EID: 84943785639     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2003.1222009     Document Type: Conference Paper

References (14)

1. W. Allegretto, Todd Klencher, and A.M. Robinson, "Micromachined polysilicon power dissipation: Simulation and experiment," IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, Vol. 16, No. 6, 1997, pp 627-637
2. A.M. Robinson, P. Haswell, R.P.W. Lawson, and M. Parameswaran, "A thermal conductivity microstructural pressure sensor fabricated in standard complementary metal-oxide semi conductor," Rev. Sci. Instrum., Vol. 63, 1992, pp. 2026-2029
3. W. Allegretto, and P. Haswell, "Numerical modeling of a micromachined thermal conductivity gas pressure sensor," IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, Vol. 13, No. 10, 1994, pp 1247-1256
4. Bing Shen, Walter Allegretto, Ming Hu, Bing Yu, A.M. Robinson, and R. Lawson, "Simulation and physical response of negative temperature coefficient of resistance polysilicon micromachined structures," Canadian J. Physics, Vol. 74, 1996, pp. 147-150
5. T.C. Kleckner, R.P.W. Lawson, and A.M. Robinson, "Constant power operation of incandescent micromachined polysilicon microresistors for use as vacuum pressure sensors," JU. Vac. Sci. Technol, Vol. 15, No. 5, 1997, pp. 2812-2815
6. W. Allegretto, Bing Shen, Zhongsheng lai, and A.M. Robinson, "Numerical modelling of time response of CMOS micromachined Thermistor sensor," Sensors and Materials, Vol. 6, No. 2, 1994, pp. 71-83
7. M. Parameswaran, A. M. Robinson, Lj. Ristic, k. Chau, and W. Allegretto, "A CMOS thermally isolated gas flow sensor," Sensors and Materials, Vol. 2, No. 1, 1990, pp 17-26
8. C. H. Mastrangelo, and R. S. Muller, "Thermal diffusivity of heavily doped low pressure chemical vapor deposited polycrystalline silicon films," Sensors and materials, Vol. 3, 1988, pp. 133-142
9. Bing Shen, Zhongsheng lai, and A.M. Robinson, "thermal response of CMOS -micromachined Thermistor sensors under constant power and constant current excitation," Rev. Sci. Instrum., Vol. 65, No. 11, 1994, pp. 3528-3534
10. M. Parameswaran, A.M. Robinson, Michael Gaitan, and Jon Geist, "Micromachined thermal radiation emitter from a commercial CMOS process," IEEE Electron Device Letters, Vol. 12, No. 2, 1991, pp. 57-59
11. Yaowu M., Y. Okawa, M. Tajiama, T. Nakai, N. Yoshiike, and K. Natukawa, "Micro-machined gas sensor array based on metal film micro-heater," Sensors and Actuators, Vol. B 79, 2001, pp. 175-181
12. Anand M. Deshpande, "Partitioned analysis and approximations in optimization of mechanical systems: A focus on electronic packages," Ph.D. Thesis, University of Colorado, 2001, pp 95-140
13. Y. Escaig, and P. Marin, "Examples of domain decomposition methods to solve non-linear problems sequentially," Advances in Engineering Software, Vol. 30, 1999, pp. 847-855
14. Tao-Yang Han, and John F. Abel, "Adaptive substructuring techniques in elasto-plastic finite element analysis," Computers & Structures, Vol. 20, No. 1-3, 1985, pp. 181-192