Simulation and physical response of negative temperature coefficient of resistance polysilicon micromachined structures

Canadian Journal of Physics

Volumn 74, Issue , 1996, Pages

  Shen, Bing ^a   Allegretto, Walter ^a   Hu, Ming ^a   Yu, Bing ^a   Robinson, A M ^a   Lawson, R ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 2742522272     PISSN: 00084204     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

1. M. Parameswaran, H.P. Baltes, Lj. Ristic, A.C. Dhadad, and A.M. Robinson. Sens. Actuators, 19, 289 (1989).
2. W. Allegretto, B. Shen, Z. Lai, and A.M. Robinson. Sens. Mater. 6, 71 (1994).
3. N.R. Swart and A. Nathan. IEEE Trans. Electron. Devices, 41, 920 (1994).
4. O. Brand, H. Baltes, and U. Baldenweg. IEEE Trans. Electron. Devices, 40, 1745 (1993).
5. B. Shen, Z. Lai, A.M. Robinson, and W. Allegretto. Rev. Sci. Instrum. 65, 3528 (1994).
6. C.H. Mastrangelo. Ph.D. thesis, University of California, Berkeley. 1991.