Investigation of mass transport phenomena in an upflow cold-wall CVD reactor by gas phase Raman spectroscopy and modeling

Journal of Crystal Growth

Volumn 279, Issue 3-4, 2005, Pages 521-530

  Hwang, Jang Y ^a   Park, Chinho ^b   Huang, Min ^a   Anderson, Tim ^a  

^a University of Florida   (United States)

^b Yeungnam University   (South Korea)

Author keywords

A1. In situ Raman spectroscopy; A1. Mass transfer; A1. Stagnation point flow reactor; A1. Two dimensional axisymmetric reactor model

Indexed keywords

ASPECT RATIO; CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; CONCENTRATION (PROCESS); DENSITY (SPECIFIC GRAVITY); FLOW OF FLUIDS; IN SITU PROCESSING; MATHEMATICAL MODELS; RAMAN SPECTROSCOPY;

GAS VELOCITY; IN SITU RAMAN SPECTROSCOPY; STAGNATION-POINT-FLOW REACTORS; TWO-DIMENSIONAL AXISYMMETRIC REACTOR MODELS;

MASS TRANSFER;

EID: 18444415776     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.02.037     Document Type: Article

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