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Journal of Materials Chemistry

Volumn 12, Issue 2, 2002, Pages 356-360

In situ Raman spectroscopic studies of trimethylindium pyrolysis in an OMVPE reactor

(4) Park, Chinho a Jung, Woo Sik a Huang, Zhisong b Anderson, Timothy J c

a Yeungnam University (South Korea)

b LAM RESEARCH CORPORATION (United States)

c University of Florida (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INDIUM; MONOMETHYLINDIUM; TRIMETHYLINDIUM; UNCLASSIFIED DRUG;

ARTICLE; ATOM; CHEMICAL ANALYSIS; DECOMPOSITION; ELECTRONICS; GAS; PYROLYSIS; RAMAN SPECTROMETRY; REACTOR; TEMPERATURE DEPENDENCE; VAPORIZATION;

EID: 0036163904 PISSN: 09599428 EISSN: None Source Type: Journal
DOI: 10.1039/b107586a Document Type: Article

Times cited : (13)

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