Synthesis and characterization of fluorinated amorphous carbon films by reactive magnetron sputtering

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 989-993

  Ishihara, M ^a   Suzuki, M ^a   Watanabe, T ^b   Nakamura, T ^a   Tanaka, A ^a   Koga, Y ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b MITSUBISHI HEAVY INDUSTRIES LTD   (Japan)

Author keywords

Diamond like carbon; Fluorine; Sputtering; Tribological property

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; DIAMOND LIKE CARBON FILMS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARDNESS; MAGNETRON SPUTTERING; RAMAN SPECTROSCOPY; SYNTHESIS (CHEMICAL); TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND-LIKE CARBON; FLUORINATION; FRICTION COEFFICIENT; TRIBOLOGICAL PROPERTY;

AMORPHOUS FILMS;

EID: 18444409422     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.12.019     Document Type: Conference Paper

References (22)

1. R.S. Weis, and T.K. Gaylord Appl. Phys., A 37 1985 191
2. J.H. Freeman, W. Temple, and G.A. Gard Vacuum 34 1984 305
3. C. Weissmantel J. Vac. Sci. Technol., A, Vac. Surf. Films 18 1981 179
4. T. Miyasato, Y. Kawakami, T. Kawano, and A. Hiraki Jpn. J. Appl. Phys. 23 1984 L234
5. O. Matsumoto, H. Toshima, and Y. Kanzaki Thin Solid Films 128 1985 341
6. I. Nagai, A. Ishitani, H. Kuroda, M. Yoshikawa, and N. Nagai J. Appl. Phys. 67 1990 2890
7. A.A. Voevodin, A.W. Phelps, J.S. Zabinski, and M.S. Donley Diamond Relat. Mater. 5 1996 1264
8. J.K. Lancaster Am. Soc Lubr. Eng., Trans. 18 1975 187
9. R. Gilmore, and R. Hauert Thin Solid Films 398-399 2001 199
10. H. Kudo, R. Shinohara, S. Takeishi, N. Awaji, and M. Yamada Jpn. J. Appl. Phys. 35 1996 1583
11. H.-s. Jung, and H.-h. Park Thin Solid Films 420-421 2002 248
12. F.L. Freire Jr., M.E.H. Maia da Costa, L.G. Jacobson, and D.F. Franceschini Diamond Relat. Mater. 10 2001 125
13. L.G. Jacobson, M.E.H. Maia da Costa, V.J. Trava-Airoldi, and F.L. Freire Jr. Diamond Relat. Mater. 12 2003 2037
14. I. Nagai, A. Ishitani, H. Kuroda, M. Yoshikawa, and N. Nagai J. Appl. Phys. 67 1990 2890
15. L.H. Chou, and H.W. Wang J. Appl. Phys. 74 1993 4673
16. K.M. Krishna, H. Ebisu, and K. Hagimoto Appl. Phys. Lett. 78 2001 294
17. J.W. Yi, Y.H. Lee, and B. Farouk Thin Solid Films 374 2000 103
18. Y. Xin, Z.Q. Gan, L. Fang, Z.Y. Ning, and S.H. Cheng Surf. Coat. Technol. 149 2002 89
19. C. Vivensang, G. Turban, E. Anger, and A. Gicquel Diamond Relat. Mater. 3 1994 645
20. R.C. Weast CRC handbook of chemistry and physics 61st edn. 1981 CRC Press Boca Rato, FL
21. R.S. Butter, D.R. Waterman, A.H. Lettington, R.T. Ramos, and E.J. Fordham Thin Solid Films 311 1997 107
22. B.K. Tay, D. Sheeja, Y.S. Choong, S.P. Lau, and X. Shi Diamond Relat. Mater. 9 2000 819