A parallel detecting, spectroscopic ellipsometer for intelligent process control of continuously deposited CIGS films

Materials Research Society Symposium - Proceedings

Volumn 616, Issue , 2000, Pages 9-14

  Simpson, L J ^a   Joshi, B S ^a   Gonzales, L A ^a   Verley, J ^b   Furtak, T E ^b  

^a ITN ENERGY SYSTEMS INC   (United States)

^b Department of Metallurgical and Materials Engineering   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COPPER COMPOUNDS; ELLIPSOMETRY; GRAIN SIZE AND SHAPE; INTELLIGENT CONTROL; INTERFACES (MATERIALS); LIGHT POLARIZATION; LIGHT REFLECTION; MICROSTRUCTURE; OPTICAL SENSORS; PROCESS CONTROL; SPECTROSCOPIC ANALYSIS; SURFACE ROUGHNESS; VAPOR DEPOSITION;

COPPER INDIUM GALLIUM ARSENIDE; PARALLEL DETECTING SPECTROSCOPIC ELLIPSOMETER (PDSE);

SEMICONDUCTING FILMS;

EID: 0034447080     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/PROC-616-9     Document Type: Article

References (0)