Electron beam probe quantization of compound composition: Surface phases and surface roughness

Thin Solid Films

Volumn 431-432, Issue , 2003, Pages 277-283

  Yamada, A ^a   Fons, P ^a   Matsubara, K ^a   Iwata, K ^a   Sakurai, K ^a   Niki, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Composition; EPMA; Micro analysis; Surface phase; Surface roughness

Indexed keywords

CRYSTAL STRUCTURE; DATA REDUCTION; ELECTRIC POTENTIAL; ELECTRON BEAMS; MICROANALYSIS; MOLECULAR BEAM EPITAXY; PHASE COMPOSITION; PHASE SEPARATION; SURFACE ROUGHNESS; X RAYS;

ELECTRON PROBE BEAM MICRO-ANALYSIS (EPMA);

THIN FILMS;

EID: 0038356614     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00271-2     Document Type: Conference Paper

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