Shape control of near-field probes using dynamic meniscus etching

Journal of Microscopy

Volumn 214, Issue 1, 2004, Pages 27-35

  Haber, L H ^a   Schaller, R D ^a   Johnson, J C ^a   Saykally, R J ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Compound parabolic concentrator; Etching techniques; Meniscus formation; Near field optics; NSOM; Optical fibre probes; Scanning microscopy; Throughput efficiency; Tip cone angle; Tip shape

Indexed keywords

HYDROFLUORIC ACID; OPTICAL FIBERS; PROBES;

COMPOUND PARABOLIC CONCENTRATOR; CONE ANGLE; ETCHING TECHNIQUE; MENISCUS FORMATION; NEAR FIELD OPTICS; OPTICAL FIBER PROBE; SCANNING MICROSCOPY; THROUGHPUT EFFICIENCY; TIP CONE ANGLE; TIP SHAPE;

ETCHING;

SOLVENT;

ARTICLE; DYNAMICS; FIBER OPTICS; GEOMETRY; IMAGE RECONSTRUCTION; MECHANICAL PROBE; MICROSCOPE; MOTION; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SCANNING NEAR FIELD OPTICAL MICROSCOPY; TIME;

EID: 1842610976     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.0022-2720.2004.01308.x     Document Type: Article

References (17)

1. Chuang, Y.H., Sun, K.G., Wang, C.J., Huang, J.Y. & Pan, C.L. (1998) A simple chemical etching technique for reproducible fabrication of robust scanning near-field fibre probes. Rev. Sci. Instrum. 69, 437-439.
2. Dunn, R.C. (1999) Near-field scanning optical microscopy. Chem. Rev. 99, 2891-2927.
3. Held, T., Emonin, S., Marti, O. & Hollricher, O. (2000) Method to produce high-resolution scanning near-field optical microscope probes by beveling optical fibres. Rev. Sci. Instrum. 71, 3118-3122.
4. Hoffmann, P., Duoit, B. & Salathe, R. (1995) Comparison of mechanically drawn and protection layer chemically etched optical fibre tips. Ultramicroscopy, 61, 165-170.
5. Islam, M.N., Zhao, X.K., Said, A.A., Mickel, S.S. & Vail, C.F. (1997) High-efficiency and high-resolution fibre-optic probes for near-field imaging and spectroscopy. Appl. Phys. Lett. 20, 2886-2888.
6. Jia-Lin, S., Juan-Hua, X., Guang-Yan, T., Ji-Hua, G., Jun, Z., Ai-Fang, X. & Ze-Bo, Z. (2001) Fabrication and application of near-field optical fibre probe. Chin. Phys. Soc. 10, 631-635.
7. Krogmeier, J.R. & Dunn, R.C. (2001) Focused ion beam modification of atomic force microscopy tips for near-field scanning optical microscopy. Appl. Phys. Lett. 79, 4494-4496.
8. Lambelet, P., Sayah, A., Pfeffer, M., Philipona, C. & Marquis-Weible, F. (1998) Chemically etched fibre tips for near-field optical microscopy: a process for smoother tips. Appl. Opt. 37, 7289-7292.
9. Liu, X., Wang, J. & Li, D. (1998) Simple device and reproducible approach for producing high efficiency optical fibre tips for a scanning optical microscope. Rev. Sci. Instrum. 69, 3439-3440.
10. Muramatsu, H., Homma, K., Chiba, N., Yamamoto, N. & Egawa, A. (1999) Dynamic etching method for fabricating a variety of tip shapes in the optical fibre probe of a scanning near-field microscope. J. Microsc. 194, 383-387.
11. Ohtsu, M. (1998) Near-Field Nano/Atom Optics and Technology. Springer-Verlag, Tokyo.
12. Paesler, M.A. & Moyer, P.J. (1996) Near-Field Optics: Theory, Instrumentation, and Applications. Wiley, New York.
13. Sayah, A., Philipona, C., Lambelet, P., Pfeffer, M. & Marquis-Weible, F. (1998) Fibre tips for scanning near-field optical microscopy fabricated by normal and reverse etching. Ultramicroscopy, 71, 59-63.
14. Spajer, M., Parent, G., Bainer, C. & Charraut, D. (2000) Shaping the reflection near-field optical probe: finite domain time difference modelling and fabrication using a focused ion beam. J. Microsc. 202, 45-49.
15. Stöckle, R., Fokas, C., Deckert, V. & Zenobi, R. (1999) High-quality near-field optical probes by tube etching. Appl. Phys. Lett. 75, 160-162.
16. Unger, M.A., Kossakovski, D.A., Kongovi, R., Beauchamp, J.L., Baldeschwieler, J.D. & Palanker, D.V. (1998) Etched chalcogenide fibres for near-field infrared scanning microscopy. Rev. Sci. Instrum. 69, 2988-2993.
17. Valaskovic, G.A., Holton, M. & Morrison, G.H. (1995) Parameter control, characterization, and optimization in the fabrication of optical fibre near-field probes. Appl. Opt. 34, 1215-1228.