Low-resistance Pt/Pd/Au ohmic contacts to p-type AlGaN

Applied Physics Letters

Volumn 84, Issue 10, 2004, Pages 1710-1712

  Kim, Han Ki ^a,b   Seong, Tae Yeon ^b   Adesida, Ilesanmi ^a   Tang, Chak Wah ^c   Lau, Kei May ^c  

^a University of Illinois at Urbana Champaign   (United States)

^b Gwangju Institute of Science and Technology (GIST)   (South Korea)

^c HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC RESISTANCE; GOLD; METALLIZING; NITROGEN; OHMIC CONTACTS; PALLADIUM; PLATINUM; SEMICONDUCTOR DOPING; X RAY PHOTOELECTRON SPECTROSCOPY;

ROOM TEMPERATURE (RT); WORK FUNCTIONS (WF);

SEMICONDUCTING ALUMINUM COMPOUNDS;

EID: 1842476914     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1668331     Document Type: Article

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