Preparation of organic monolayers on uniform and patterned silicon substrates

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5223, Issue , 2003, Pages 9-23

  Hartmann, N ^a   Balgar, Th ^a   Bautista, R ^a   Dahlhaus, D ^a   Franzka, S ^a   Hasselbrink, E ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

Alkylsilanes; Atomic force microscopy; Growth kinetics; H terminated silicon; Laser direct writing; Octadecyltrichlorosilane; Patterning; Quartz crystal microbalance; Self assembled monolayer; Silicon oxide

Indexed keywords

ADSORPTION; ATOMIC FORCE MICROSCOPY; CHEMISORPTION; CRYSTALS; GRAVIMETRIC ANALYSIS; HYDROGEN BONDS; HYDROLYSIS; REACTION KINETICS; SELF ASSEMBLY; SILANES; SILICON; THERMAL EFFECTS;

ALKYLSILANES; H-TERMINATED SILICON; LASER DIRECT WRITING; OCTADECYLTRICHLOROSILANE; ORGANIC MONOLAYERS; QUARTZ CRYSTAL MICROBALANCE;

MONOLAYERS;

EID: 1842454897     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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