Comparative study of different modes of calibration and quantification in radiofrequency glow discharge optical emission spectroscopy (rf-GD-OES)

Journal of Analytical Atomic Spectrometry

Volumn 19, Issue 3, 2004, Pages 333-344

  Anfone, Alwyn B ^a   Marcus, R Kenneth ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ELECTRIC POTENTIAL; EMISSION SPECTROSCOPY; LEAST SQUARES APPROXIMATIONS; LIGHT EMISSION; SPUTTERING; STATISTICAL METHODS;

DC BIAS POTENTIAL; RADIOFREQUENCY GLOW DISCHARGE OPTICAL EMISSION SPECTROSCOPY; SPUTTERING RATE CALIBRATION;

GLOW DISCHARGES;

EID: 1842431405     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/b310600d     Document Type: Article

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