On-line determination of sputtered depth in a radio frequency glow discharge atomic emission source by laser confocal displacement

Surface and Interface Analysis

Volumn 27, Issue 11, 1999, Pages 962-971

  Hartenstein, Matthew L ^a   Marcus, R Kenneth ^a  

^a CLEMSON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EMISSION SPECTROSCOPY; GLOW DISCHARGES; LASER APPLICATIONS; PLASMAS; SENSORS; SPUTTERING;

LASER CONFOCAL DISPLACEMENT SENSOR (LCDS); RADIOFREQUENCY GLOW DISCHARGE;

SURFACE DISCHARGES;

EID: 0033352475     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199911)27:11<962::AID-SIA660>3.0.CO;2-6     Document Type: Article

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