Nano-oxidation of vanadium thin films using atomic force microscopy

Journal of Materials Science Letters

Volumn 17, Issue 22, 1998, Pages 1941-1943

  Vaccaro, P O ^a   Sakata, S ^a   Yamaoka, S ^b   Umezu, I ^b   Sugimura, A ^b  

^a ADVANCED TELECOMMUNICATIONS RESEARCH INSTITUTE INTERNATIONAL   (Japan)

^b KONAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; METALLIC FILMS; NANOTECHNOLOGY; OXIDATION; THIN FILMS;

NANO-OXIDATION PROCESS;

VANADIUM;

EID: 0032201735     PISSN: 02618028     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1006616711693     Document Type: Article

References (6)

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