Correlation between photoluminescence intensity and micro structure in amorphous silicon films prepared by reactive RF sputtering

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 39, Issue 8 B, 2000, Pages

  Umezu, Ikurou ^a   Murota, Takatoshi ^a   Kawata, Masayuki ^a   Takashima, Yoshiaki ^a   Yoshida, Ken ichi ^a   Inada, Mitsuru ^a   Sugimura, Akira ^a  

^a KONAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CORRELATION METHODS; DEFECTS; HYDROGENATION; MICROSTRUCTURE; PHOTOLUMINESCENCE; SPUTTERING;

REACTIVE SPUTTERING;

AMORPHOUS FILMS;

EID: 0034245002     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.l844     Document Type: Article

References (16)

1. L. T. Canham: Appl. Phys. Lett. 57 (1990) 1046.
2. Y. Yamada, T. Orii, I. Umezu, S. Takeyama and T. Yoshida: Jpn. J. Appl. Phys. 35 (1996) 1361.
3. Y. Yoshida, S. Takeyama, Y. Yamada and K. Mutoh: J. Appl. Phys. 68 (1996) 1772.
4. S. Furukawa and T. Miyasato: Jpn. J. Appl. Phys. 27 (1988) L2207.
5. Y. Nakayama, M. Uecha and T. Ikeda: J. Non-Cryst. Solids 198-200 (1996) 915.
6. D. J. Wolfold, J. A. Reimer and B. A. Scott: Appl. Phys. Lett. 42 (1983) 369.
7. F. Kozlowski, V. Petrova-Koch, A. Kux, W. Stadler, A. Fleischmann and H. Sigmund: J. Non-Cryst. Solids 137/138 (1991) 91.
8. H. Oheda: Phys. Rev. B 52 (1995) 16530.
9. R. A. Street: Semiconductor & Semimetals, ed. J. I. Pankove (Academic Press, New York, 1984) Vol. 21, Pt. B, p. 197.
10. R. A. Street: Hydrogenated Amorphous Silicon (Cambridge University Press, Cambridge, 1991).
11. T. D. Moustakas: Semiconductor & Semimetals, ed. J. I. Pankove (Academic Press, New York, 1984) Vol. 21, Pt. A, p. 55.
12. A. C. Boccara and D. Fournier: Opt. Lett. 5 (1980) 377.
13. I. Umezu, M. Daigo and K. Maeda: Jpn. J. Appl. Phys. 33 (1994) L873.
14. C. C. Tsang and R. A. Street: Phys. Rev. B 19 (1979) 3027.
15. N. Maley and J. S. Lannin: Phys. Rev. B 36 (1987) 1146.
16. I. G. Austin, W. A. Jackson, T. M. Searle, P. K. Bhat and R. A. Gibson: Philos. Mag. B 52 (1985) 271.