Soft x-ray multilayer monochromator with improved resolution and low specular background

X-Ray Spectrometry

Volumn 30, Issue 4, 2001, Pages 212-215

  André, Jean Michel ^a   Benbalagh, Rabah ^a   Barchewitz, Robert ^a   Ravet, Marie Françoise ^b   Raynal, Alain ^b   Delmotte, Frank ^b   Bridou, Françoise ^b   Julie, Gwaénaelle ^c   Bosseboeuf, Alain ^c   Laval, René ^c   Soullié, Gérard ^d,e   Rémond, Christian ^d,e   Fialin, Michel ^a  

^a SORBONNE UNIVERSITÉ   (France)

^b UNIV PARIS SUD   (France)

^c UNIV PARIS SUD   (France)

^d CEA DAM DIF   (France)

^e UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

MONOCHROMATORS; MULTILAYERS;

LAMELLAR MULTILAYER AMPLITUDE GRATINGS; MULTILAYER DEPOSITIONS; MULTILAYER MONOCHROMATORS; PERFORMANCE; PHOTON ENERGY; REACTIVE-ION ETCHING; SOFT X-RAY MULTILAYERS; UV LITHOGRAPHY;

REACTIVE ION ETCHING;

EID: 18044384233     PISSN: 00498246     EISSN: None     Source Type: Journal    
DOI: 10.1002/xrs.489     Document Type: Article

References (18)

1. Nicolosi JA, Groven JP, Merlo D. Adv. X-Ray Anal. 1987; 30: 183.
2. Potts PJ, Tindle AG. Mineral. Mag. 1989; 53: 357.
3. Bastin GF, Heijligers HJM. Scanning 1990; 12: 22.
4. Bastin GF, Heijligers HJM. Scanning 1991; 13: 325.
5. Charbonnier M, Gaillard F, Romand MJ, Urch DS. Adv. X-Ray Anal. 1991; 34: 139.
6. MacGee JJ, Slack FF, Herrington CR. Amer. Mineral 1991; 76: 681.
7. Habulihaz B, Martins E, Gampblin S, Urch DS. X-Ray Spectrom. 1996; 25: 15.
8. Huang TC, Fung A, White RL. X-Ray Spectrom. 1996; 18: 53.
9. Hombourger C, Jonnard P, André J-M, Chauvineau J-P. X-Ray Spectrom. 1999; 28: 163.
10. Arbaoui M, André J-M, Couillaux P, Barchewitz R. Rev. Sci. Instrum. 1985; 56: 2055.
11. Arbaoui M, Barchewitz R, André J-M, Lepêtre Y, Rivoira R. Opt. Eng. 1986; 25: 1207.
12. Marmoret R, André J-M. Appl. Opt. 1983; 22: 17.
13. Pardo B, Mégadémini T, André J-M. Rev. Phys. Appl. 1988; 23: 1579.
14. Sammar AE, André J-M, Ouahabi M, Pardo B, Barchewitz R. C. R. Acad. Sci., Ses. II 1993; 316: 10.
15. Fialin M, Rémy H, André J-M, Chauvineau J-P, Rousseaux F, Ravet M-F, Decanini D, Cambril E. X-Ray Spectrom. 1996; 25: 60.
16. Sammar A, Krastev K, André J-M, Barchewitz R, Rivoira R. Rev. Sci. Instrum. 1997; 68: 2969.
17. André J-M, Sammar A, Barchewitz R, Bizeuil C, Stemmler P, Villette B. J. X-Ray Sci. Technolo. 1998; 8: 171.
18. Krastev K, André J-M, Barchewitz R. J. Opt. Soc. Am. 1996; 13: 2027.