Extending the Possibilities of Soft X-Ray Spectrometry Through the Etching of Layered Synthetic Microstructure Monochromators

X-Ray Spectrometry

Volumn 25, Issue 2, 1996, Pages 60-65

  Fialin, M ^a,d   Remy H ^a   Andre J M ^a   Chauvineau, J P ^b   Rousseaux, F ^c   Ravet, M F ^c   Decanini, D ^c   Cambril, E ^c  

^a SORBONNE UNIVERSITÉ   (France)

^b INSTITUT D'OPTIQUE GRADUATE SCHOOL   (France)

^c Lab Microstructures Microlectron   (France)

^d CAMECA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTRON BEAM LITHOGRAPHY; ELECTRON PROBE MICROANALYSIS; MONOCHROMATORS; REACTIVE ION ETCHING; SILICON COMPOUNDS; SPECTROMETRY; TRACE ELEMENTS; X RAY SPECTROMETERS;

BRAGG ANGLES; ELECTRON PROBE MICROANALYSES; ELECTRON-PROBE MICROANALYSIS; GLANCING ANGLE; SOFT X-RAY; SPECTROMETRY TECHNIQUE; SPECULAR REFLECTIONS; WAVELENGTH DISPERSIVE SPECTROMETERS; X RAY FLUORESCENCE; X RAY SPECTROMETRY;

MICROSTRUCTURE;

EID: 0042374652     PISSN: 00498246     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-4539(199603)25:2<60::AID-XRS138>3.0.CO;2-2     Document Type: Article

References (9)

1. A. E. Sammar, J. M. André, M. Ouahabi, B. Pardo and R. Barchewitz, C. R. Acad. Sci. 316-11, 1055 (1993).
2. J. P. Chauvineau, Rev. Phys. Appl. 23 1645 (1988).
3. P. H. Berning, in Physics of Thin Films 1, edited by G. Hass, p. 63. (1969).
4. B. L. Henke, E. M. Gullikson and J. C. Davis, At. Data Nucl. Data Tables 54, 181 (1993).
5. J. M. André, A. E. Sammar, S. Bac, M. Ouahabi, M. Idir, G. Soullié and R. Barchewitz, J. Phys. III France 4, 1659 (1994).
6. Y. Chen, R. Kupka, F. Rousseaux, F. Carcenac, D. Decanini, M. F. Ravet and H. Launois, J. Vac. Sci. Technol. B12(6) (1994).
7. A. M. Haghiri-Gosnet, F. Rousseaux, B. Kebabi, F. R. Ladan, C. Mayeux, A. Madouri, D. Decanini, J. Bourneix, F. Carcenac and H. Launois, J. Vac. Sci. Technol. B8(6) (1990).
8. F. R. Ladan, C. Khan-Malek, R. Rivoira and T. Moreno, in Le Vide, Les Couches Minces 256, Proceedings of the 8th International Conference on Plasma Processes, Antibes, France, pp. 298-300 (1991).
9. M. Idir, A. Mirone, G. Soullié, P. Guérin, F. R. Ladan, H. Launois, A. Sammar, J. M. André and R. Barchewitz, presented at the X-ray Microscopy IV Conference, Moscow, 1994, to be published.