Recombination at the silicon nitride/silicon interface

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 4, 1997, Pages 2418-2425

  Elmiger, J R ^a   Schieck, R ^a   Kunst, M ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031476154     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580757     Document Type: Article

References (43)

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