Effects of gas ratio on electrical properties of electron-cyclotron-resonance nitride films grown at room temperature

Journal of Applied Physics

Volumn 79, Issue 11, 1996, Pages 8503-8506

  Chang, Kow Ming ^a   Tsai, Jung Yu ^a   Li, Chii Horng ^a   Yeh, Ta Hsun ^a   Wang, Shih Wei ^a   Yang, Ji Yi ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000382515     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362528     Document Type: Review

References (11)

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