Microstructure and electronic investigations of carbon nitride films deposited by RF magnetron sputtering

Thin Solid Films

Volumn 482, Issue 1-2, 2005, Pages 41-44

  Lagrini, A ^a   Charvet, S ^b   Benlahsen, M ^b   Debiemme Chouvy, C ^a   Deslouis, C ^a   Cachet, H ^a  

^a SORBONNE UNIVERSITÉ   (France)

^b Universite de Picardie Jules Verne   (France)

Author keywords

Carbon; Nitrides; Raman spectroscopy; Sputtering

Indexed keywords

DEPOSITION; MAGNETRON SPUTTERING; MICROSTRUCTURE; OPTICAL PROPERTIES; RAMAN SPECTROSCOPY; SUBSTRATES; THERMAL EFFECTS; THIN FILMS;

BIAS VOLTAGE; COPLANAR; DECOMPOSITION REACTIONS; RADIO FREQUENCY (RF);

CARBON NITRIDE;

EID: 17644419291     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.154     Document Type: Conference Paper

References (19)

1. K. Yoo, B. Miller, R. Kalish, and X. Shi Electrochem. Solid-State Lett. 2 1999 233
2. N.K. Yee, Q. Shi, W. Cai, D.A. Scherson, and B. Miller Electrochem. Solid-State Lett. 4 2001 E42
3. C. Levy-Clement, F. Zenia, N.A. Ndao, and A. Deneuville New Diam. Front. Carbon Technol. 9 1999 189
4. I. Duo, A. Fujishima, and Ch. Comninellis Electrochem. Commun. 3 2003 695
5. H. Cachet, C. Deslouis, M. Chouiki, B. Saidani, N.M.J. Conway, and C. Godet J. Electrochem. Soc. 149 7 2002 E233
6. G. Adamopoulos, C. Godet, C. Deslouis, H. Cachet, A. Lagrini, and B. Saidani Diamond Relat. Mater. 12 2003 613
7. A. Lagrini, C. Deslouis, H. Cachet, M. Benlahsen, and S. Charvet Electrochem. Commun. 6 2004 245
8. M. Lejeune, O. Durand-Drouhin, S. Charvet, A. Grosman, C. Ortega, and M. Benlahsen Thin Solid Films 444 2003 1
9. O. Durand-Drouhin, M. Benlahsen, M. Clin, and R. Bouzerar Appl. Surf. Lett. 233 4 2004 269
10. L. Hultman, J. Neidhardt, N. Hellgren, H. Sjöström, and J.-E. Sundgren Mater. Res. Soc. Bull. 2003 (March) 194
11. A.A. Voevodin, J.G. Jones, J. Zabinski, Zs. Czigány, and L. Hultman J. Appl. Phys. 92 2002 724
12. N. Hellgren, M.P. Johansson, E. Broitman, P. Sandström, L. Hultman, and J.-E. Sundgren Thin Solid Films 382 2001 146
13. R. Kalfoten, T. Sebald, and G. Weise Thin Solid Films 308/309 1997 118
14. A.C. Ferrari, S.E. Rodil, and J. Robertson Phys. Rev., B 67 2003 155306
15. J.F. Ziegler The Stopping and Range of Ions in Matter (SRIM) (IBM Research) 1985
16. D. Beeman, J. Silverman, R. Lynds, and M.R. Anderson Phys. Rev., B 30 1984 870
17. F. Tuinstra, and J.L. Koenig J. Chem. Phys. 53 1970 1126
18. A.C. Ferrari, and J. Robertson Phys. Rev., B 61 2000 14095; Phys. Rev., B 64 2001 75414
19. A.C. Ferrari, and J. Robertson Phys. Rev., B 61 2000 14095; Phys. Rev., B 64 2001 75414