A micro-hotplate-based monolithic CMOS gas sensor array

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 4, Issue , 2003, Pages

  Barrettino, D ^a   Graf, M ^a   Zimmermann, M ^a   Hagleitner, C ^a   Hierlemann, A ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CMOS INTEGRATED CIRCUITS; MICROMACHINING; RESISTORS; SYSTEMS ANALYSIS; THERMAL EFFECTS;

MICRO-HOT PLATES; SENSOR CHIPS;

CHEMICAL SENSORS;

EID: 0038419505     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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