Smart single-chip CMOS microhotplate array for metal-oxide-based gas sensors

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 123-126

  Graf, M ^a   Barrettino, D ^a   Kaser P ^a   Cerda J ^a   Hierlemann, A ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Biomembranes; Circuits; Conducting materials; Doping; Gas detectors; Inorganic materials; Sensor arrays; Temperature control; Temperature sensors; Thick films

Indexed keywords

ACTUATORS; CHEMICAL SENSORS; CONDUCTIVE FILMS; DESIGN; DOPING (ADDITIVES); FILMS; GAS DETECTORS; METALLIC COMPOUNDS; METALS; MICROSYSTEMS; NANOCRYSTALS; NETWORKS (CIRCUITS); PRECIOUS METALS; SEMICONDUCTOR DOPING; SENSOR ARRAYS; TEMPERATURE CONTROL; TEMPERATURE SENSORS; THICK FILMS; TRANSDUCERS;

BIOMEMBRANES; CONDUCTING MATERIALS; INORGANIC MATERIALS; INTEGRATED CIRCUITRY; MICROHOTPLATE ARRAYS; NANOCRYSTALLINE METAL; ON-CHIP TEMPERATURE; TEMPERATURE CONTROL LOOP;

SOLID-STATE SENSORS;

EID: 84944725816     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215268     Document Type: Conference Paper

References (11)

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