A comparison of PZT-based and TiNi shape memory alloy-based MEMS microactuators

Ferroelectrics

Volumn 306, Issue , 2004, Pages 221-226

  Lai, Bo Kuai ^a   Kahn, H ^a   Phillips, S M ^b   Heuer, A H ^a  

^a Case Western Reserve University   (United States)

^b Arizona State University   (United States)

Author keywords

MEMS; PZT films; Thickness limitation; TiNi films

Indexed keywords

ELECTRIC POTENTIAL; MICROACTUATORS; PRESSURE EFFECTS; SHAPE MEMORY EFFECT; THIN FILMS;

MEMS; PZT FILMS; THICKNESS LIMITATION; TINI FILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 17644383219     PISSN: 00150193     EISSN: 15635112     Source Type: Conference Proceeding    
DOI: 10.1080/00150190490460867     Document Type: Article

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