Design of a new sensor for mass flow controller using thin-film technology based on an analytical thermal model

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 6, 1998, Pages 3559-3563

  Rudent, P ^a   Navratil, P ^a   Giani, A ^b   Boyer, A ^b  

^a Qualiflow   (France)

^b UNIVERSITÉ MONTPELLIER II   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032339302     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580998     Document Type: Article

References (9)

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