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Volumn 41, Issue 4, 2004, Pages 190-198

In-Situ Lift-Out of TEM - Samples by Micro Manipulation in a Scanning Electron Microscope;In-situ lift-out von TEM - Proben durch Mikromanipulation in einem Rasterelektronenmikroskop

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM DEPOSITION; MICRO MANIPULATORS; VACUUM CHAMBERS; CONTACT POINTS; ELECTRON BEAM-INDUCED DEPOSITION; HIGH-PRECISION; LIFT OUTS; MICRO MANIPULATION; TEM GRIDS;

EID: 2142639442     PISSN: 0032678X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (6)

References (7)
  • 3
    • 84862353186 scopus 로고    scopus 로고
    • http://www.nanotechnik.com
  • 7
    • 2142857341 scopus 로고    scopus 로고
    • Patentanmeldung Sept.
    • Burkhardt, C.; Nisch, W.: Patentanmeldung Sept. 2003
    • (2003)
    • Burkhardt, C.1    Nisch, W.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.