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Volumn 313-316, Issue SUPPL., 2003, Pages 342-347

Experimental modeling of transport and deposition of hydrocarbon radicals on ITER-FEAT cold trap

Author keywords

Deposition; High frequency discharge; Hydrocarbon radicals; ITER FEAT; Magnetron discharge; Surface loss probability

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; ELECTRIC DISCHARGES; FILM GROWTH; HYDROCARBONS; MAGNETRONS; QUARTZ;

EID: 17144473353     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3115(02)01340-5     Document Type: Conference Paper
Times cited : (7)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.