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Volumn 398-399, Issue , 2001, Pages 99-103

Application of FTIR phase-modulated ellipsometry to the characterisation of thin films on surface-enhanced IR absorption active substrates

(3) Garcia Caurel, E a Bertran, E a Canillas, A a

a UNIVERSITY OF BARCELONA (Spain)

Author keywords

Amorphous silicon; Ellipsometry; Metallic islands; SEIRA

Indexed keywords

AMORPHOUS SILICON; ANISOTROPY; COMPUTER SIMULATION; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MULTILAYERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

SURFACE-ENHANCED INFRARED ABSORPTION (SEIRA);

THIN FILMS;

EID: 0035505456 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01309-8 Document Type: Conference Paper

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.