Real-time characterization of film growth on transparent substrates by rotating-compensator multichannel ellipsometry

Applied Optics

Volumn 37, Issue 19, 1998, Pages 4230-4238

  Lee, Joungchel ^a   Collins, Robert W ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038815642     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.004230     Document Type: Article

References (26)

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