Alignment and calibration of the MgF2 biplate compensator for applications in rotating-compensator multichannel ellipsometry

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 18, Issue 8, 2001, Pages 1980-1985

  Lee, Joungchel ^a   Rovira, P I ^a   An, Ilsin ^a   Collins, Robert W Collins ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL CAPACITY; MAGNESIUM COMPOUNDS; PHOTONS; SPECTROSCOPIC ANALYSIS;

BIPLATE COMPENSATORS;

ELLIPSOMETRY;

EID: 0038119157     PISSN: 10847529     EISSN: 15208532     Source Type: Journal    
DOI: 10.1364/JOSAA.18.001980     Document Type: Article

References (23)

1. Z. Sekera, “Light scattering in the atmosphere and the polarization of sky light,” J. Opt. Soc. Am. 47, 484-490 (1957).
2. P. S. Hauge and F. H. Dill, “A rotating-compensator Fourier ellipsometer,” Opt. Commun. 14, 431-437 (1975).
3. J. Lee, P. I. Rovira, I. An, and R. W. Collins, “Rotating-compensator multichannel ellipsometry: Applications for real time Stokes vector spectroscopy of thin film growth,” Rev. Sci. Instrum. 69, 1800-1810 (1998).
4. R. M. A. Azzam, “Photopolarimetric measurement of the Mueller matrix by Fourier analysis of a single detected signal,” Opt. Lett. 2, 148-150 (1978).
5. P. S. Hauge, “Mueller matrix ellipsometry with imperfect compensators,”J. Opt. Soc. Am. 68, 1519-1528 (1978).
6. R. W. Collins and J. Koh, “Dual rotating-compensator multichannel ellipsometer: Instrument design for real-time Mueller matrix spectroscopy of surfaces and films,” J. Opt. Soc. Am. A 16, 1997-2006 (1999).
7. W. A. Shurcliff, Polarized Light: Production and Use Harvard University, Cambridge, Mass., (1962).
8. D. Clarke and J. F. Grainger, Polarized Light and Optical Measurement (Pergamon, New York, 1971).
9. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
10. J. M. Bennett and H. E. Bennett, “Polarization,” in Handbook of Optics, W. G. Driscoll and W. Vaughan, eds. (McGraw-Hill, New York, 1978), pp. 10-1-10-164.
11. R. A. Yarussi, A. R. Heyd, H. V. Nguyen, and R. W. Collins, “Multichannel transmission ellipsometer for characterization of anisotropic optical materials,” J. Opt. Soc. Am. A 11, 2320-2330 (1994).
12. D. E. Aspnes, “Alignment of an optically active biplate compensator,”Appl. Opt. 10, 2545-2546 (1971).
13. D. E. Aspnes, “Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsom- eters,” J. Opt. Soc. Am. 64, 812-819 (1974).
14. D. M. Radman and B. D. Cahan, “Errors in ’Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsometers’,” J. Opt. Soc. Am. 71, 1546 (1981).
15. J. M. M. de Nijs and A. van Silfhout, “Systematic and random errors in rotating-analyzer ellipsometry,” J. Opt. Soc. Am. A 5, 773-781 (1988).
16. R. W. Collins, “Automatic rotating element ellipsometers: Calibration, operation, and real-time applications,” Rev. Sci. Instrum. 61, 2029-2062 (1990).
17. J. Opsal, J. Fanton, J. Chen, J. Leng, L. Wei, C. Uhrich, M. Senko, C. Zaiser, and D. E. Aspnes, “Broadband spectral operation of a rotating-compensator ellipsometer,” Thin Solid Films 313-314, 58-61 (1998).
18. N. V. Nguyen, B. S. Pudliner, I. An, and R. W. Collins, “Error correction for calibration and data reduction in rotating-polarizer ellipsometry: Applications to a novel multichannel ellipsometer,” J. Opt. Soc. Am. A 8, 919-931 (1991).
19. I. An, J. Lee, B. Hong, and R. W. Collins, “Simultaneous determination of reflectance spectra along with E, A(E) in multichannel ellipsometry: Applications to instrument calibration and reduction of real-time data,” Thin Solid Films 313-314, 79-84 (1998).
20. T. M. Cotter, M. E. Thomas, and W. J. Tropf, “Magnesium fluoride (MgF2),” in Handbook of Optical Constants of Solids II, E. D. Palik, ed. (Academic, New York, 1991), pp. 899-918.
21. J. Lee, J. Koh, and R. W. Collins, “Dual rotating-compensator multichannel ellipsometer: Instrument development for high-speed Mueller matrix spectroscopy of surfaces and films,” Rev. Sci. Instrum. 72, 1742-1754(2001).
22. P. Chindaudom and K. Vedam, “Optical characterization of inhomogeneous transparent films on transparent substrates by spectroscopic ellipsometry, in Optical Characterization of Real Surface and Films, K. Vedam, ed. (Academic, New York, 1994), pp. 191-247.
23. R. Kleim, L. Kunstler, and A. El Ghemmaz, “Systematic errors in rotating-compensator ellipsometry, J. Opt. Soc. Am. A 11, 2550-2559 (1994).