Non-destructive optical depth profiling and real-time evaluation of spectroscopic data

Thin Solid Films

Volumn 364, Issue 1, 2000, Pages 64-74

  Fried, M ^a   Redei L ^a  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

BACKPROPAGATION; ELECTROCHEMISTRY; ELLIPSOMETRY; FEEDFORWARD NEURAL NETWORKS; ION IMPLANTATION; LEARNING ALGORITHMS; LEARNING SYSTEMS; NONDESTRUCTIVE EXAMINATION; POROUS SILICON; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS; THIN FILMS;

NONDESTRUCTIVE OPTICAL DEPTH PROFILING; SPECTROSCOPIC ELLIPSOMETRY (SE); WAFER MAPPING;

SEMICONDUCTING FILMS;

EID: 17044452327     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00904-9     Document Type: Article

References (45)

1. Azzam R.M.A., Bashara N.M. Ellipsometry and Polarized Light, North-Holland, Amsterdam. 1977.
2. Papers of 1st ICSE, January 1993, Paris, Thin Solid Films, 233 (1993).
3. Papers of 2nd ICSE, May 1997, Charleston, SC, Thin Solid Films, 313/314 (1998).
4. Collins R.W. Rev. of Sci. Instrum. 61:1990;2029.
5. Quinn W.E., Aspnes D.E., Brasil M.J.S.P., et al. J. Vac. Sci. Technol. B. 10:1992;759.
6. Aspnes D.E. J. Opt. Soc. Am. A. 10:1993;974.
7. Pickering C. Thin Solid Films. 313/314:1998;406.
8. Drude P. Ann. Phys. Chem. 36:1889;865.
9. Drude P. Ann. Phys. Chem. 39:1890;481.
10. Johnson W.E., Crane R.L., Dobrowolski J.A. Verly P.G. Proc. SPIE. Proc. SPIE. 2064:(1993);88.
11. Hall J.F. J. Opt. Soc. Am. 48:1958;654.
12. Jacobssen R. Wolf E. Progress in Optics. Progress in Optics. 5:1975;249.
13. Bovard B.G. Appl. Opt. 27:1988;1998.
14. Vigoureux J.M. J. Opt. Soc. Am. A. 8:1991;1697.
15. Rivory J. Thin Solid Films. 313/314:1998;333.
16. Lehnert W., Petrik P., Schneider C., Pfitzner L., Ryssel H. NIST'98 Gaithersburg. AIP Conf. Proc. 449:1998;326.
17. Kildemo M., Hunderi O., Drevillon B. J. Opt. Soc. Am. A. 14:1997;931.
18. Tonova D., Konova A. Surf. Sci. 293:1993;195.
19. Tonova D., Konova A. Surf. Sci. 349:1996;221.
20. Fried M., Lohner T., Aarnink W.A., Hanekamp L.J., van Silfhout A. J. Appl. Phys. 71:1992;2835.
21. Petrik P., Polgár O., Lohner T., Fried M., Khánh N.Q., Gyulai J. Vacuum. 50:1998;293.
22. Fried M., Lohner T., Polgár O., et al. Thin Solid Films. 276:1996;223.
23. Pettersson L.A.A., Hultman L., Arwin H. Appl. Opt. 37:1998;4130.
24. Fried M., Masa P. J. Appl. Phys. 75:1994;2194.
25. Rédei L., Fried M., Bársony I., Wallinga H. Thin Solid Films. 313/314:1998;150.
26. Fried M., Lohner T., Aarnink W.A., Hanekamp L.J., van Silfhout A. J. Appl. Phys. 71:1992;5260.
27. Fredrickson J.E., Waddell C.N., Spitzer W.G., Hubler G.K. Appl. Phys. Lett. 40:1982;172.
28. Waddell C.N., Spitzer W.G., Fredrickson J.E., Hubler G.K., Kennedy T.A. J. Appl. Phys. 55:1984;4361.
29. Fried M., Lohner T., Vizkelethy G., Jároli E., Mezey G., Gyulai J. Nucl. Instrum. Methods B. 15:1986;422.
30. Roorda S., Sinke W.C., Poate J.M., et al. Phys. Rev. B. 44:1991;3702.
31. Palik E.D. Handbook of Optical Constants of Solids. 1985;Academic Press, Boston.
32. Aspnes D.E. Palik E.D. Handbook of Optical Constants of Solids. 1985;Academic Press, Boston. , Chapter 5.
33. Lohner T., Mezey G., Kótai E., Pászti F., Manuaba A. J. Gyulai, Nucl. Instrum. Methods. 209/210:1983;615.
34. Lohner T., Kótai E., Khánh N.Q., et al. Nucl. Instrum. Methods B. 85:1994;335.
35. Erman M., Theeten J.B. Surf. Sci. 135:1983;353.
36. Vanhellemont J., Roussel Ph., Maes H.E. Nucl. Instrum. Methods B. 55:1991;183.
37. Adams J.R., Bashara N.M. Surf. Sci. 49:1975;441.
38. Fried M., Lohner T., Jároli E., Khanh N.Q., Hajdu C., Gyulai J. J. Appl. Phys. 72:1992;2197.
39. Lohner T., Khánh N.Q. Zs. Zolnai, Acta Phys. Slovaca. 48:1998;44.
40. Fried M., Polgár O., Lohner T., Strehlke S., Levy-Clement C. J. Lumin. 80:1999;147.
41. Freeman J.A., Skapura D.M. Neural Networks. 1991;Addison-Wesley, Reading, MA.
42. Hecht-Nielsen R. Neurocomputing. 1990;Addison-Wesley, Reading, MA.
43. Rédei L., Wallinga H. Nucl. Instrum. Methods A. 389:1997;233.
44. Vanhellemont J., Maes H.E., De Veirman A. J. Appl. Phys. 65:1989;4454.
45. Final Management Report and Technical Report, COPERNICUS project CIPA-CT94-0131, 'RESPECT'.