Ultrasound radiating performances of piezoelectric micromachined ultrasonic transmitter

Applied Physics Letters

Volumn 86, Issue 3, 2005, Pages 1-3

  Wang, Zhihong ^a   Zhu, Weiguang ^a   Tan, Ooi Kiang ^a   Chao, Chen ^a   Zhu, Hong ^b   Miao, Jianmin ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

LEAD ZIRCONATE TITANATE (PZT); MICROMACHINED ULTRASONIC TRANSDUCERS (MUT); PIEZOELECTRIC FILMS; ULTRASONIC TRANSMITTERS;

INTEGRATED CIRCUITS; LEAD COMPOUNDS; MICROMACHINING; MULTILAYERS; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; TRANSDUCERS; TRANSMITTERS; ULTRASONICS;

PIEZOELECTRIC DEVICES;

EID: 17044400935     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1855417     Document Type: Article

References (15)

1. J. J. Bernstein, S. L. Finberg, K. Houston, L. C. Niles, H. D. Chen, L. E. Cross, K. K. Li, and K. Udayakumar, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 44, 960 (1997).
2. B. Xu, L. E. Cross, and J. J. Bernstein, Thin Solid Films 377, 712 (2000).
3. F. Akasheh, T. Myers, J. D. Fraser, S. Bose, and A. Bandyopadhyay, Sens. Actuators, A 111, 275 (2004).
4. Ö. Oralkan, A. S. Ergun, J. A. Johnson, M. Karaman, U. Demirci, K. Kaviani, T. H. Lee, and B. T. Khuri-Yakub, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 49, 1596 (2002).
5. P. C. Eccardt and K. Neiderer, Ultrasonics 38, 774 (2000).
6. S. C. Ko, Y. C. Kim, S. S. Lee, S. H. Choi, and S. R. Kim, Sens. Actuators, A 103, 130 (2003).
7. K. Yamashida, H. Katata, M. Okuyama, H. Miyoshi, G. Kato, S. Aoyagi, and Y. Suzuki, Sens. Actuators, A 97, 302 (2002).
8. K. Yamashida, L. Chansomphou, H. Murakami, and M. Okuyama, Sens. Actuators, A 114, 147 (2004).
9. P. Muralt, D. Schmitt, N. Ledermann, J. Baborowski, P. K. Weber, W. Steichen, S. Petitgrand, A. Bosseboeuf, N. Setter, and P. Gaucher, Proceedings of the 2001 IEEE Ultrasonics Symposium (IEEE, New York, 2001), pp. 907-911.
10. J. Baborowski, N. Ledermann, and P. Muralt, Proceedings of the 2002 IEEE Ultrasonics Symposium (IEEE, New York, 2002), pp. 1051-1054.
11. J. Baborowski, P. Muralt, N. Ledermann, S. Petitgrand, A. Bosseboeuf, N. Setter, and P. Gaucher, Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics (IEEE, Nara, 2002), pp. 483-486.
12. G. Percin and B. T. Khuri-Yakub, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 49, 573 (2002).
13. G. Percin and B. T. Khuri-Yakub, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 49, 585 (2002).
14. W. Zhu, Z. Wang, C. Zhao, O. Tan, and H. Hng, Jpn. J. Appl. Phys., Part 1 41, 6969 (2002).
15. L. Yao, L. Lu, Z. Wang, and W. Zhu, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 50, 1262 (2003).