Applications of micro hot embossing for optical switch formation

Sensors and Actuators, A: Physical

Volumn 119, Issue 2, 2005, Pages 433-440

  Shan, X C ^a   Ikehara, T ^b   Murakoshi, Y ^b   Maeda, R ^b  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Hot embossing; Micromirror; Micromold; Optical switch; Polycarbonate

Indexed keywords

ANNEALING; MICROELECTROMECHANICAL DEVICES; MICROLENSES; MIRRORS; POLYCARBONATES; PRESSURE EFFECTS; SURFACE ROUGHNESS; THERMAL EFFECTS;

HOT EMBOSSING; MICROCHANNELS; MICROFABRICATION; MICROMIRRORS;

OPTICAL SWITCHES;

EID: 17044396401     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.09.026     Document Type: Article

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