Sensors based on SiC-AlN MEMS

Proceedings - Electrochemical Society

Volumn 6, Issue , 2004, Pages 287-299

  Doppalapudi, Dharanipal ^a   Mlcak, Richard ^a   Chan, Jeffrey ^a   Tuller, Harry L ^a,c   Abell, Joshua ^b   Li, Wei ^b   Moustakas, Theodore D ^b  

^a Boston MicroSystems Inc   (United States)

^b BOSTON UNIVERSITY   (United States)

^c MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FLUID SENSORS; MICRORESONATORS; PIEZOELECTRIC FILMS; POLYCRYSTALLINE MORPHOLOGY;

ACTUATORS; MICROMACHINING; OPTICAL DEVICES; PIEZOELECTRIC DEVICES; POLYCRYSTALLINE MATERIALS; SENSORS; SILICON CARBIDE; SINGLE CRYSTALS; SUBSTRATES; THERMODYNAMIC STABILITY;

MICROELECTROMECHANICAL DEVICES;

EID: 17044381774     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)

1. R. Mlcak, H.L. Tuller, "Electrochemical Etching Process," US Patent # 5,338,416, Aug. 16 (1994).
2. R. Mlcak, H.L. Tuller, "p-n Junction Etch-Stop Techniques for Electrochemical Micromachining of Semiconductors," US Patent # 5,464,509, Nov. 7, (1995).
3. K. Tsubouchi, N. Mikoshiba, IEEE Teans. On Sonics and Ultra. Vol. SU-32, 634 (1995).
4. H. M. Liaw, F.S. Hickernell, IEEE Trans. On Ultrasonics, Ferroelectrics and Frequency control, 42, 404 (1995).
5. C. Deger, E. Born, H. Angerer, O. Ambacher, M. Stutzmann, J.Hornsteiner, E. Riha, G. Fischerauer, Appl. Phys. Lett., 72, 2400 (1998).
6. J. Deng, D. Ciplys, G. Bu, M.S. Shur, R. Gaska, Mat. Res. Soc. Fall 2002 meeting
7. H.L. Tuller, R. Mlcak, Current opinion in solid state & materials science, 3, 501 (1998).
8. D.L. DeVoe, Sensors and Actuators A 88, 263 (2001).
9. B. Piekarski, D.DeVoe, M. Dubey, R. Kaul, J. Conrad, Sensors and Actuators A 91, 313 (2001).
10. S. Sassen, R. Voss, J. Schalk, E. Stenzel, T. Gleissner, R. Gruenberger, F. Neubauer, W. Ficker, W. Kupke, K. Bauer, M. Rose, Sensors and Actuators, 83, 80, (2000).
11. L.A. Pinnaduwage, V. Boiadjiev, J.E. Hawk, T. Thundat, Apl. Phys. Lett., 83(7), 1471 (2003).
12. A. Gupta, D. Akin, R. Bashir, Appl. Phys. Lett., 84(11), 1976 (2004).
13. H.L. Tuller, R. Mlcak, Sensors and Actuators B, 35-36, 255 (1996).
14. D. Doppalapudi, T.D. Moustakas, Handbook of Thin Films, ed. By H.S. Nalwa, Vol 4, 57 (2002).
15. H.Hosaka, K.Itao, S.Kuroda, Sensors and Actuators, Vol A49, 87 (1995)
16. T.K. Eto, B.J. Costello, S.W. Wenzel, R.M. White, and B. Ribinsky R., J. Biomechanical Eng. 115, 329 (1993).
17. Martin, S.J.Frye, G.C.Cernosek, R.W.Senturia, S.D., Proceedings Solid-State Sensor and Actuator Workshop, 13-16 June 1994, Hilton Head, SC, pp. 229-233 (1994).
18. Acoustic Wave Sensors, Eds. D.S. Ballantine, R.M. White, S.I. Martin, A.J. Ricco, E.T. Zellers, G.C. Frye and H. Wohltjen, eds. Academic Press, (1997).
19. Wenzel, S.W, White, R.M., IEEE Trans. Electron Devices, ED-35, p.735, (1988).